Formation of crystalline iron oxide nanostructures by electron beam-induced deposition at room temperature

M. Shimojo, M. Takeguchi, K. Furuya

Research output: Contribution to journalArticle

33 Citations (Scopus)


Electron beam-induced deposition (EBID) using organometallic precursors is a promising technique for nanometre-sized fabrication, but the deposits have been mostly limited to carbonaceous materials. In this study, vapours of water and iron pentacarbonyl were mixed with precise control and the mixture used as a precursor for EBID. We have succeeded in achieving direct formation of Fe 3O4 nanostructures at room temperature. This will contribute to broadening the range of materials that can be produced by EBID.

Original languageEnglish
Article number003
Pages (from-to)3637-3640
Number of pages4
Issue number15
Publication statusPublished - 2006 Aug 14


ASJC Scopus subject areas

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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