Formation of crystalline iron oxide nanostructures by electron beam-induced deposition at room temperature

Masayuki Shimojo, M. Takeguchi, K. Furuya

Research output: Contribution to journalArticle

32 Citations (Scopus)

Abstract

Electron beam-induced deposition (EBID) using organometallic precursors is a promising technique for nanometre-sized fabrication, but the deposits have been mostly limited to carbonaceous materials. In this study, vapours of water and iron pentacarbonyl were mixed with precise control and the mixture used as a precursor for EBID. We have succeeded in achieving direct formation of Fe 3O4 nanostructures at room temperature. This will contribute to broadening the range of materials that can be produced by EBID.

Original languageEnglish
Article number003
Pages (from-to)3637-3640
Number of pages4
JournalNanotechnology
Volume17
Issue number15
DOIs
Publication statusPublished - 2006 Aug 14
Externally publishedYes

Fingerprint

Iron oxides
iron oxides
Electron beams
Nanostructures
electron beams
Crystalline materials
room temperature
carbonaceous materials
Steam
Organometallics
Temperature
Deposits
deposits
Vapors
vapors
Iron
iron
Fabrication
fabrication
water

ASJC Scopus subject areas

  • Engineering (miscellaneous)
  • Materials Science(all)
  • Physics and Astronomy (miscellaneous)

Cite this

Formation of crystalline iron oxide nanostructures by electron beam-induced deposition at room temperature. / Shimojo, Masayuki; Takeguchi, M.; Furuya, K.

In: Nanotechnology, Vol. 17, No. 15, 003, 14.08.2006, p. 3637-3640.

Research output: Contribution to journalArticle

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