Formation of crystalline iron oxide nanostructures by electron beam-induced deposition at room temperature

M. Shimojo; M. Takeguchi; K. Furuya

doi:10.1088/0957-4484/17/15/003

Formation of crystalline iron oxide nanostructures by electron beam-induced deposition at room temperature

M. Shimojo, M. Takeguchi, K. Furuya

Research output: Contribution to journal › Article › peer-review

34 Citations (Scopus)

Abstract

Electron beam-induced deposition (EBID) using organometallic precursors is a promising technique for nanometre-sized fabrication, but the deposits have been mostly limited to carbonaceous materials. In this study, vapours of water and iron pentacarbonyl were mixed with precise control and the mixture used as a precursor for EBID. We have succeeded in achieving direct formation of Fe ₃O₄ nanostructures at room temperature. This will contribute to broadening the range of materials that can be produced by EBID.

Original language	English
Article number	003
Pages (from-to)	3637-3640
Number of pages	4
Journal	Nanotechnology
Volume	17
Issue number	15
DOIs	https://doi.org/10.1088/0957-4484/17/15/003
Publication status	Published - 2006 Aug 14
Externally published	Yes

ASJC Scopus subject areas

Bioengineering
Chemistry(all)
Materials Science(all)
Mechanics of Materials
Mechanical Engineering
Electrical and Electronic Engineering

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