Abstract
Electron beam-induced deposition (EBID) using organometallic precursors is a promising technique for nanometre-sized fabrication, but the deposits have been mostly limited to carbonaceous materials. In this study, vapours of water and iron pentacarbonyl were mixed with precise control and the mixture used as a precursor for EBID. We have succeeded in achieving direct formation of Fe 3O4 nanostructures at room temperature. This will contribute to broadening the range of materials that can be produced by EBID.
| Original language | English |
|---|---|
| Article number | 003 |
| Pages (from-to) | 3637-3640 |
| Number of pages | 4 |
| Journal | Nanotechnology |
| Volume | 17 |
| Issue number | 15 |
| DOIs | |
| Publication status | Published - 2006 Aug 14 |
| Externally published | Yes |
Fingerprint
ASJC Scopus subject areas
- Engineering (miscellaneous)
- Materials Science(all)
- Physics and Astronomy (miscellaneous)
Cite this
Formation of crystalline iron oxide nanostructures by electron beam-induced deposition at room temperature. / Shimojo, Masayuki; Takeguchi, M.; Furuya, K.
In: Nanotechnology, Vol. 17, No. 15, 003, 14.08.2006, p. 3637-3640.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Formation of crystalline iron oxide nanostructures by electron beam-induced deposition at room temperature
AU - Shimojo, Masayuki
AU - Takeguchi, M.
AU - Furuya, K.
PY - 2006/8/14
Y1 - 2006/8/14
N2 - Electron beam-induced deposition (EBID) using organometallic precursors is a promising technique for nanometre-sized fabrication, but the deposits have been mostly limited to carbonaceous materials. In this study, vapours of water and iron pentacarbonyl were mixed with precise control and the mixture used as a precursor for EBID. We have succeeded in achieving direct formation of Fe 3O4 nanostructures at room temperature. This will contribute to broadening the range of materials that can be produced by EBID.
AB - Electron beam-induced deposition (EBID) using organometallic precursors is a promising technique for nanometre-sized fabrication, but the deposits have been mostly limited to carbonaceous materials. In this study, vapours of water and iron pentacarbonyl were mixed with precise control and the mixture used as a precursor for EBID. We have succeeded in achieving direct formation of Fe 3O4 nanostructures at room temperature. This will contribute to broadening the range of materials that can be produced by EBID.
UR - http://www.scopus.com/inward/record.url?scp=33748900286&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=33748900286&partnerID=8YFLogxK
U2 - 10.1088/0957-4484/17/15/003
DO - 10.1088/0957-4484/17/15/003
M3 - Article
AN - SCOPUS:33748900286
VL - 17
SP - 3637
EP - 3640
JO - Nanotechnology
JF - Nanotechnology
SN - 0957-4484
IS - 15
M1 - 003
ER -