Formation of iron nano-dot arrays by electron beam-induced deposition using an ultrahigh vacuum transmission electron microscope

M. Tanaka, M. Shimojo, M. Takeguchi, K. Mitsuishi, K. Furuya

Research output: Contribution to journalConference article

10 Citations (Scopus)


We have successfully fabricated arrays of nano-dots containing iron (Fe) from iron pentacarbonyl gas sources on Si (1 1 1) substrates by electron beam-induced deposition in an ultrahigh vacuum transmission electron microscope. The nano-dots formed on Si (1 1 1)-7×7 surfaces showed amorphous structure of Fe and small amount of carbon mixture as deposited at room temperature, but changed their structure into crystal after annealing at 700 K. From structural analysis the dots are suggested to be α-Fe.

Original languageEnglish
Pages (from-to)e2361-e2366
JournalJournal of Crystal Growth
Issue number1-2
Publication statusPublished - 2005 Feb 15



  • A1. Characterization
  • A3. Metalorganic chemical vapor deposition
  • B1. Nanomaterials

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry

Cite this