Formation of iron nano-dot arrays by electron beam-induced deposition using an ultrahigh vacuum transmission electron microscope

M. Tanaka, Masayuki Shimojo, M. Takeguchi, K. Mitsuishi, K. Furuya

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

We have successfully fabricated arrays of nano-dots containing iron (Fe) from iron pentacarbonyl gas sources on Si (1 1 1) substrates by electron beam-induced deposition in an ultrahigh vacuum transmission electron microscope. The nano-dots formed on Si (1 1 1)-7×7 surfaces showed amorphous structure of Fe and small amount of carbon mixture as deposited at room temperature, but changed their structure into crystal after annealing at 700 K. From structural analysis the dots are suggested to be α-Fe.

Original languageEnglish
JournalJournal of Crystal Growth
Volume275
Issue number1-2
DOIs
Publication statusPublished - 2005 Feb 15
Externally publishedYes

Fingerprint

Ultrahigh vacuum
Structural analysis
ultrahigh vacuum
Electron beams
Electron microscopes
Carbon
Iron
electron microscopes
Crystal structure
Gases
electron beams
Annealing
iron
Substrates
structural analysis
Temperature
crystal structure
annealing
carbon
room temperature

Keywords

  • A1. Characterization
  • A3. Metalorganic chemical vapor deposition
  • B1. Nanomaterials

ASJC Scopus subject areas

  • Condensed Matter Physics

Cite this

Formation of iron nano-dot arrays by electron beam-induced deposition using an ultrahigh vacuum transmission electron microscope. / Tanaka, M.; Shimojo, Masayuki; Takeguchi, M.; Mitsuishi, K.; Furuya, K.

In: Journal of Crystal Growth, Vol. 275, No. 1-2, 15.02.2005.

Research output: Contribution to journalArticle

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AU - Furuya, K.

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