Formation of iron nano-dots by electron beam induced deposition using an ultrahigh vacuum transmission electron microscope

M. Tanaka; F. Chu; M. Shimojo; M. Takeguchi; K. Furuya

doi:10.1109/imnc.2004.245722

Formation of iron nano-dots by electron beam induced deposition using an ultrahigh vacuum transmission electron microscope

M. Tanaka, F. Chu, M. Shimojo, M. Takeguchi, K. Furuya

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Digest of Papers - Microprocesses and Nanotechnology 2004
Publisher	The Japan Society of Applied Physics
Pages	60-61
Number of pages	2
ISBN (Print)	4990247205, 9784990247201
DOIs	https://doi.org/10.1109/imnc.2004.245722
Publication status	Published - 2004
Externally published	Yes
Event	2004 International Microprocesses and Nanotechnology Conference - Osaka, Japan Duration: 2004 Oct 26 → 2004 Oct 29

Publication series

Name	Digest of Papers - Microprocesses and Nanotechnology 2004

Conference

Conference	2004 International Microprocesses and Nanotechnology Conference
Country	Japan
City	Osaka
Period	04/10/26 → 04/10/29

ASJC Scopus subject areas

Engineering(all)

Access to Document

10.1109/imnc.2004.245722

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Tanaka, M., Chu, F., Shimojo, M., Takeguchi, M., & Furuya, K. (2004). Formation of iron nano-dots by electron beam induced deposition using an ultrahigh vacuum transmission electron microscope. In Digest of Papers - Microprocesses and Nanotechnology 2004 (pp. 60-61). [28B-4-2] (Digest of Papers - Microprocesses and Nanotechnology 2004). The Japan Society of Applied Physics. https://doi.org/10.1109/imnc.2004.245722

Formation of iron nano-dots by electron beam induced deposition using an ultrahigh vacuum transmission electron microscope. / Tanaka, M.; Chu, F.; Shimojo, M.; Takeguchi, M.; Furuya, K.

Digest of Papers - Microprocesses and Nanotechnology 2004. The Japan Society of Applied Physics, 2004. p. 60-61 28B-4-2 (Digest of Papers - Microprocesses and Nanotechnology 2004).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Tanaka, M, Chu, F, Shimojo, M, Takeguchi, M & Furuya, K 2004, Formation of iron nano-dots by electron beam induced deposition using an ultrahigh vacuum transmission electron microscope. in Digest of Papers - Microprocesses and Nanotechnology 2004., 28B-4-2, Digest of Papers - Microprocesses and Nanotechnology 2004, The Japan Society of Applied Physics, pp. 60-61, 2004 International Microprocesses and Nanotechnology Conference, Osaka, Japan, 04/10/26. https://doi.org/10.1109/imnc.2004.245722

Tanaka M, Chu F, Shimojo M, Takeguchi M, Furuya K. Formation of iron nano-dots by electron beam induced deposition using an ultrahigh vacuum transmission electron microscope. In Digest of Papers - Microprocesses and Nanotechnology 2004. The Japan Society of Applied Physics. 2004. p. 60-61. 28B-4-2. (Digest of Papers - Microprocesses and Nanotechnology 2004). https://doi.org/10.1109/imnc.2004.245722

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