Formation of iron nano-dots by electron beam induced deposition using an ultrahigh vacuum transmission electron microscope

M. Tanaka, F. Chu, Masayuki Shimojo, M. Takeguchi, K. Furuya

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The fabrication of arrays of iron nano-dots on cleaned Si substrates by electron beam induced deposition (EBID) using ultrahigh vacuum (UHV) transmission electron microscope (TEM) was investigated. The samples were Si(111) slices prepared as TEM specimens by mechanical dimpling followed by chemical etching, with an etchant HNO3. After fabrication and observation of dots, the room temperature (RT)-deposited substrates were annealed at 700K for 1 hour and were observed again. Results show that the spots from the dots form hexagonal with lattice spacing of 0.203±nm and they are rotated about 17.5 degrees from <200> Si.

Original languageEnglish
Title of host publicationDigest of Papers - Microprocesses and Nanotechnology 2004
Pages60-61
Number of pages2
Publication statusPublished - 2004
Externally publishedYes
Event2004 International Microprocesses and Nanotechnology Conference - Osaka
Duration: 2004 Oct 262004 Oct 29

Other

Other2004 International Microprocesses and Nanotechnology Conference
CityOsaka
Period04/10/2604/10/29

Fingerprint

Ultrahigh vacuum
Electron beams
Electron microscopes
Iron
Fabrication
Substrates
Etching
Temperature

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Tanaka, M., Chu, F., Shimojo, M., Takeguchi, M., & Furuya, K. (2004). Formation of iron nano-dots by electron beam induced deposition using an ultrahigh vacuum transmission electron microscope. In Digest of Papers - Microprocesses and Nanotechnology 2004 (pp. 60-61)

Formation of iron nano-dots by electron beam induced deposition using an ultrahigh vacuum transmission electron microscope. / Tanaka, M.; Chu, F.; Shimojo, Masayuki; Takeguchi, M.; Furuya, K.

Digest of Papers - Microprocesses and Nanotechnology 2004. 2004. p. 60-61.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Tanaka, M, Chu, F, Shimojo, M, Takeguchi, M & Furuya, K 2004, Formation of iron nano-dots by electron beam induced deposition using an ultrahigh vacuum transmission electron microscope. in Digest of Papers - Microprocesses and Nanotechnology 2004. pp. 60-61, 2004 International Microprocesses and Nanotechnology Conference, Osaka, 04/10/26.
Tanaka M, Chu F, Shimojo M, Takeguchi M, Furuya K. Formation of iron nano-dots by electron beam induced deposition using an ultrahigh vacuum transmission electron microscope. In Digest of Papers - Microprocesses and Nanotechnology 2004. 2004. p. 60-61
Tanaka, M. ; Chu, F. ; Shimojo, Masayuki ; Takeguchi, M. ; Furuya, K. / Formation of iron nano-dots by electron beam induced deposition using an ultrahigh vacuum transmission electron microscope. Digest of Papers - Microprocesses and Nanotechnology 2004. 2004. pp. 60-61
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