Formation of iron nano-dots by electron beam induced deposition using an ultrahigh vacuum transmission electron microscope

M. Tanaka, F. Chu, M. Shimojo, M. Takeguchi, K. Furuya

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationDigest of Papers - Microprocesses and Nanotechnology 2004
PublisherThe Japan Society of Applied Physics
Pages60-61
Number of pages2
ISBN (Print)4990247205, 9784990247201
DOIs
Publication statusPublished - 2004
Event2004 International Microprocesses and Nanotechnology Conference - Osaka, Japan
Duration: 2004 Oct 262004 Oct 29

Publication series

NameDigest of Papers - Microprocesses and Nanotechnology 2004

Conference

Conference2004 International Microprocesses and Nanotechnology Conference
CountryJapan
CityOsaka
Period04/10/2604/10/29

ASJC Scopus subject areas

  • Engineering(all)

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  • Cite this

    Tanaka, M., Chu, F., Shimojo, M., Takeguchi, M., & Furuya, K. (2004). Formation of iron nano-dots by electron beam induced deposition using an ultrahigh vacuum transmission electron microscope. In Digest of Papers - Microprocesses and Nanotechnology 2004 (pp. 60-61). [28B-4-2] (Digest of Papers - Microprocesses and Nanotechnology 2004). The Japan Society of Applied Physics. https://doi.org/10.1109/imnc.2004.245722