Formation of iron silicide nano-islands on Si substrates by metal organic chemical vapor deposition under electron beams

M. Tanaka, F. Chu, Masayuki Shimojo, M. Takeguchi, K. Mitsuishi, K. Furuya

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

Electron-beam induced chemical vapor deposition (EBI-CVD) of Fe(CO) 5 was performed on both Si (111) and (110) substrates at 673-873 K inside an ultrahigh vacuum transmission electron microscope. The formation of iron silicide islands was observed on both substrates. Cubic silicide nano-rods were formed on Si(111) substrates by EBI-CVD with focused electron beams. The formation of β-FeSi2 islands was mainly observed on Si(110) substrates by EBI-CVD when the electron beam was broadly spread. It was shown that the size and the intensity of the electron beam played a significant role in EBI-CVD and affected the CVD process extensively.

Original languageEnglish
Pages (from-to)2667-2671
Number of pages5
JournalJournal of Materials Science
Volume41
Issue number9
DOIs
Publication statusPublished - 2006 May
Externally publishedYes

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Organic Chemicals
Organic chemicals
metalorganic chemical vapor deposition
Chemical vapor deposition
Electron beams
Iron
Metals
electron beams
iron
Substrates
vapor deposition
Ultrahigh vacuum
ultrahigh vacuum
Electron microscopes
rods
electron microscopes

ASJC Scopus subject areas

  • Materials Science(all)
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

Formation of iron silicide nano-islands on Si substrates by metal organic chemical vapor deposition under electron beams. / Tanaka, M.; Chu, F.; Shimojo, Masayuki; Takeguchi, M.; Mitsuishi, K.; Furuya, K.

In: Journal of Materials Science, Vol. 41, No. 9, 05.2006, p. 2667-2671.

Research output: Contribution to journalArticle

Tanaka, M. ; Chu, F. ; Shimojo, Masayuki ; Takeguchi, M. ; Mitsuishi, K. ; Furuya, K. / Formation of iron silicide nano-islands on Si substrates by metal organic chemical vapor deposition under electron beams. In: Journal of Materials Science. 2006 ; Vol. 41, No. 9. pp. 2667-2671.
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