Formation of metal nano-wires on heat-treated substrates using an ultrahigh vacuum transmission electron microscope

M. Tanaka, T. Wagner, M. Takeguchi, M. Han, Masayuki Shimojo, K. Mitsuishi, K. Furuya

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Formation of metal nano-islands on heat-treated substrates by either conventional deposition or by electron beam-induced chemical vapour deposition (EBI-CVD) was performed at elevated temperatures in an ultrahigh vacuum transmission electron microscope (UHV-TEM). Pd islands on SrTiO3 (001) substrates, Pd silicide islands on Si (111) substrates, and Fe silicide islands on Si (111) substrates showed bimodal island growth; both substrates blocked islands and nano-wires. The morphologies of these islands are suggested to be sensitive to the substrate conditions because of heat treatment before deposition. Selective growth of the nano-wires was successful in the case of EBI-CVD.

Original languageEnglish
Pages (from-to)1568-1572
Number of pages5
JournalSurface and Interface Analysis
Volume38
Issue number12-13
DOIs
Publication statusPublished - 2006 Dec
Externally publishedYes

Fingerprint

Ultrahigh vacuum
ultrahigh vacuum
Electron microscopes
electron microscopes
Metals
wire
Wire
heat
Substrates
metals
Chemical vapor deposition
Electron beams
vapor deposition
electron beams
Hot Temperature
Heat treatment
heat treatment

Keywords

  • Electron beam induced deposition
  • Nanowires
  • UHV-TEM

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Colloid and Surface Chemistry

Cite this

Formation of metal nano-wires on heat-treated substrates using an ultrahigh vacuum transmission electron microscope. / Tanaka, M.; Wagner, T.; Takeguchi, M.; Han, M.; Shimojo, Masayuki; Mitsuishi, K.; Furuya, K.

In: Surface and Interface Analysis, Vol. 38, No. 12-13, 12.2006, p. 1568-1572.

Research output: Contribution to journalArticle

Tanaka, M. ; Wagner, T. ; Takeguchi, M. ; Han, M. ; Shimojo, Masayuki ; Mitsuishi, K. ; Furuya, K. / Formation of metal nano-wires on heat-treated substrates using an ultrahigh vacuum transmission electron microscope. In: Surface and Interface Analysis. 2006 ; Vol. 38, No. 12-13. pp. 1568-1572.
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