Formation of metal nano-wires on heat-treated substrates using an ultrahigh vacuum transmission electron microscope

M. Tanaka; T. Wagner; M. Takeguchi; M. Han; M. Shimojo; K. Mitsuishi; K. Furuya

doi:10.1002/sia.2402

Formation of metal nano-wires on heat-treated substrates using an ultrahigh vacuum transmission electron microscope

M. Tanaka, T. Wagner, M. Takeguchi, M. Han, M. Shimojo, K. Mitsuishi, K. Furuya

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

Formation of metal nano-islands on heat-treated substrates by either conventional deposition or by electron beam-induced chemical vapour deposition (EBI-CVD) was performed at elevated temperatures in an ultrahigh vacuum transmission electron microscope (UHV-TEM). Pd islands on SrTiO₃ (001) substrates, Pd silicide islands on Si (111) substrates, and Fe silicide islands on Si (111) substrates showed bimodal island growth; both substrates blocked islands and nano-wires. The morphologies of these islands are suggested to be sensitive to the substrate conditions because of heat treatment before deposition. Selective growth of the nano-wires was successful in the case of EBI-CVD.

Original language	English
Pages (from-to)	1568-1572
Number of pages	5
Journal	Surface and Interface Analysis
Volume	38
Issue number	12-13
DOIs	https://doi.org/10.1002/sia.2402
Publication status	Published - 2006 Dec

Keywords

Electron beam induced deposition
Nanowires
UHV-TEM

ASJC Scopus subject areas

Chemistry(all)
Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
Materials Chemistry

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10.1002/sia.2402

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abstract = "Formation of metal nano-islands on heat-treated substrates by either conventional deposition or by electron beam-induced chemical vapour deposition (EBI-CVD) was performed at elevated temperatures in an ultrahigh vacuum transmission electron microscope (UHV-TEM). Pd islands on SrTiO3 (001) substrates, Pd silicide islands on Si (111) substrates, and Fe silicide islands on Si (111) substrates showed bimodal island growth; both substrates blocked islands and nano-wires. The morphologies of these islands are suggested to be sensitive to the substrate conditions because of heat treatment before deposition. Selective growth of the nano-wires was successful in the case of EBI-CVD.",

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T1 - Formation of metal nano-wires on heat-treated substrates using an ultrahigh vacuum transmission electron microscope

AU - Tanaka, M.

AU - Wagner, T.

AU - Takeguchi, M.

AU - Han, M.

AU - Shimojo, M.

AU - Mitsuishi, K.

AU - Furuya, K.

PY - 2006/12

Y1 - 2006/12

N2 - Formation of metal nano-islands on heat-treated substrates by either conventional deposition or by electron beam-induced chemical vapour deposition (EBI-CVD) was performed at elevated temperatures in an ultrahigh vacuum transmission electron microscope (UHV-TEM). Pd islands on SrTiO3 (001) substrates, Pd silicide islands on Si (111) substrates, and Fe silicide islands on Si (111) substrates showed bimodal island growth; both substrates blocked islands and nano-wires. The morphologies of these islands are suggested to be sensitive to the substrate conditions because of heat treatment before deposition. Selective growth of the nano-wires was successful in the case of EBI-CVD.

AB - Formation of metal nano-islands on heat-treated substrates by either conventional deposition or by electron beam-induced chemical vapour deposition (EBI-CVD) was performed at elevated temperatures in an ultrahigh vacuum transmission electron microscope (UHV-TEM). Pd islands on SrTiO3 (001) substrates, Pd silicide islands on Si (111) substrates, and Fe silicide islands on Si (111) substrates showed bimodal island growth; both substrates blocked islands and nano-wires. The morphologies of these islands are suggested to be sensitive to the substrate conditions because of heat treatment before deposition. Selective growth of the nano-wires was successful in the case of EBI-CVD.

KW - Electron beam induced deposition

KW - Nanowires

KW - UHV-TEM

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