Formation of metal nano-wires on heat-treated substrates using an ultrahigh vacuum transmission electron microscope

M. Tanaka, T. Wagner, M. Takeguchi, M. Han, M. Shimojo, K. Mitsuishi, K. Furuya

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Formation of metal nano-islands on heat-treated substrates by either conventional deposition or by electron beam-induced chemical vapour deposition (EBI-CVD) was performed at elevated temperatures in an ultrahigh vacuum transmission electron microscope (UHV-TEM). Pd islands on SrTiO3 (001) substrates, Pd silicide islands on Si (111) substrates, and Fe silicide islands on Si (111) substrates showed bimodal island growth; both substrates blocked islands and nano-wires. The morphologies of these islands are suggested to be sensitive to the substrate conditions because of heat treatment before deposition. Selective growth of the nano-wires was successful in the case of EBI-CVD.

Original languageEnglish
Pages (from-to)1568-1572
Number of pages5
JournalSurface and Interface Analysis
Volume38
Issue number12-13
DOIs
Publication statusPublished - 2006 Dec 1

Keywords

  • Electron beam induced deposition
  • Nanowires
  • UHV-TEM

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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