Abstract
Formation of metal nano-islands on heat-treated substrates by either conventional deposition or by electron beam-induced chemical vapour deposition (EBI-CVD) was performed at elevated temperatures in an ultrahigh vacuum transmission electron microscope (UHV-TEM). Pd islands on SrTiO3 (001) substrates, Pd silicide islands on Si (111) substrates, and Fe silicide islands on Si (111) substrates showed bimodal island growth; both substrates blocked islands and nano-wires. The morphologies of these islands are suggested to be sensitive to the substrate conditions because of heat treatment before deposition. Selective growth of the nano-wires was successful in the case of EBI-CVD.
| Original language | English |
|---|---|
| Pages (from-to) | 1568-1572 |
| Number of pages | 5 |
| Journal | Surface and Interface Analysis |
| Volume | 38 |
| Issue number | 12-13 |
| DOIs | |
| Publication status | Published - 2006 Dec 1 |
Keywords
- Electron beam induced deposition
- Nanowires
- UHV-TEM
ASJC Scopus subject areas
- Chemistry(all)
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Materials Chemistry
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Cite this
Tanaka, M., Wagner, T., Takeguchi, M., Han, M., Shimojo, M., Mitsuishi, K., & Furuya, K. (2006). Formation of metal nano-wires on heat-treated substrates using an ultrahigh vacuum transmission electron microscope. Surface and Interface Analysis, 38(12-13), 1568-1572. https://doi.org/10.1002/sia.2402