Abstract
Formation of metal nano-islands on heat-treated substrates by either conventional deposition or by electron beam-induced chemical vapour deposition (EBI-CVD) was performed at elevated temperatures in an ultrahigh vacuum transmission electron microscope (UHV-TEM). Pd islands on SrTiO3 (001) substrates, Pd silicide islands on Si (111) substrates, and Fe silicide islands on Si (111) substrates showed bimodal island growth; both substrates blocked islands and nano-wires. The morphologies of these islands are suggested to be sensitive to the substrate conditions because of heat treatment before deposition. Selective growth of the nano-wires was successful in the case of EBI-CVD.
| Original language | English |
|---|---|
| Pages (from-to) | 1568-1572 |
| Number of pages | 5 |
| Journal | Surface and Interface Analysis |
| Volume | 38 |
| Issue number | 12-13 |
| DOIs | |
| Publication status | Published - 2006 Dec |
| Externally published | Yes |
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Keywords
- Electron beam induced deposition
- Nanowires
- UHV-TEM
ASJC Scopus subject areas
- Physical and Theoretical Chemistry
- Colloid and Surface Chemistry
Cite this
Formation of metal nano-wires on heat-treated substrates using an ultrahigh vacuum transmission electron microscope. / Tanaka, M.; Wagner, T.; Takeguchi, M.; Han, M.; Shimojo, Masayuki; Mitsuishi, K.; Furuya, K.
In: Surface and Interface Analysis, Vol. 38, No. 12-13, 12.2006, p. 1568-1572.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Formation of metal nano-wires on heat-treated substrates using an ultrahigh vacuum transmission electron microscope
AU - Tanaka, M.
AU - Wagner, T.
AU - Takeguchi, M.
AU - Han, M.
AU - Shimojo, Masayuki
AU - Mitsuishi, K.
AU - Furuya, K.
PY - 2006/12
Y1 - 2006/12
N2 - Formation of metal nano-islands on heat-treated substrates by either conventional deposition or by electron beam-induced chemical vapour deposition (EBI-CVD) was performed at elevated temperatures in an ultrahigh vacuum transmission electron microscope (UHV-TEM). Pd islands on SrTiO3 (001) substrates, Pd silicide islands on Si (111) substrates, and Fe silicide islands on Si (111) substrates showed bimodal island growth; both substrates blocked islands and nano-wires. The morphologies of these islands are suggested to be sensitive to the substrate conditions because of heat treatment before deposition. Selective growth of the nano-wires was successful in the case of EBI-CVD.
AB - Formation of metal nano-islands on heat-treated substrates by either conventional deposition or by electron beam-induced chemical vapour deposition (EBI-CVD) was performed at elevated temperatures in an ultrahigh vacuum transmission electron microscope (UHV-TEM). Pd islands on SrTiO3 (001) substrates, Pd silicide islands on Si (111) substrates, and Fe silicide islands on Si (111) substrates showed bimodal island growth; both substrates blocked islands and nano-wires. The morphologies of these islands are suggested to be sensitive to the substrate conditions because of heat treatment before deposition. Selective growth of the nano-wires was successful in the case of EBI-CVD.
KW - Electron beam induced deposition
KW - Nanowires
KW - UHV-TEM
UR - http://www.scopus.com/inward/record.url?scp=33845946028&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=33845946028&partnerID=8YFLogxK
U2 - 10.1002/sia.2402
DO - 10.1002/sia.2402
M3 - Article
AN - SCOPUS:33845946028
VL - 38
SP - 1568
EP - 1572
JO - Surface and Interface Analysis
JF - Surface and Interface Analysis
SN - 0142-2421
IS - 12-13
ER -