Formation of periodic strained layers associated with nanovoids inside a silicon carbide single crystal induced by femtosecond laser irradiation

Tatsuya Okada, Takuro Tomita, Shigeki Matsuo, Shuichi Hashimoto, Yoichiro Ishida, Satoshi Kiyama, Tomonori Takahashi

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23 Citations (Scopus)

Abstract

We observed the formation of subwavelength periodic strained layers associated with nanovoids in the cross section of femtosecond laser-irradiated lines written inside 4H -SiC single crystals. Both conventional and high-voltage transmission electron microscopies were carried out for microstructural analyses. The cross section of the irradiated lines consists of four to six groups of fine periodic structures. Each group is composed of strained layers with a typical spacing of 150 or 300 nm. The layers extend along the irradiated lines, aligned parallel to the electric field of the laser light. Tiny voids approximately 20 nm in diameter are found in the layers.

Original languageEnglish
Article number054307
JournalJournal of Applied Physics
Volume106
Issue number5
DOIs
Publication statusPublished - 2009 Sep 28
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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