Formation of protection layer during oxidation of Al-implanted TiN coating

Thananan Akhadejdamrong, Atsushi Mitsuo, Chihiro Iwamoto, Takahisa Yamamoto, Yuichi Ikuhara, Tatsuhiko Aizawa

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

A protective nanocrystalline aluminum oxide layer forms during oxidation of Al-implanted TiN thin film coating on stainless steel substrate. TiN itself has poor chemical stability at elevated temperatures in an oxidizing atmosphere. Implantation of Al-ions to a TiN film, prepared by hollow cathode discharge ion plating (HCD-IP), at 4.5 × 1017 ions·cm-2 has greatly improved thermal oxidation resistance at temperatures up to 973 K and for periods up to 20 h in a pure oxygen atmosphere. Al-implantation significantly reduced the oxidation rate of the TiN. The apparent activation energy for oxidation increased with increasing Al-dose. At the initial stage of oxidation, free metallic aluminum and/or new AlN- or more likely (Ti, Al)N-reacted with oxygen prior to oxidation of TiN. The thin aluminum oxide layer formed on the implanted samples was dense and free from surface flaws. This layer is thought to act as a barrier to oxygen migration protecting the TiN film from further oxidation. The diffusion of Al-atoms was a driving mechanism to activate the protection of TiN at high oxidation temperatures. The alteration of the oxidation kinetics and mechanism of the implanted TiN in an oxygen atmosphere is a consequence of the effective modification of oxide properties through Al incorporation.

Original languageEnglish
Pages (from-to)1291-1297
Number of pages7
JournalMaterials Transactions
Volume43
Issue number6
Publication statusPublished - 2002 Jun
Externally publishedYes

Fingerprint

coatings
Coatings
Oxidation
oxidation
Oxygen
Aluminum Oxide
Aluminum
Ion implantation
oxygen
Oxides
atmospheres
implantation
Ions
aluminum oxides
Thermooxidation
Stainless Steel
Chemical stability
Oxidation resistance
ion plating
oxidation resistance

Keywords

  • Activation energy
  • Aluminum oxide
  • Ion implantation
  • Nanocrystalline
  • Thin film
  • Titanium nitride

ASJC Scopus subject areas

  • Materials Science(all)
  • Metals and Alloys

Cite this

Akhadejdamrong, T., Mitsuo, A., Iwamoto, C., Yamamoto, T., Ikuhara, Y., & Aizawa, T. (2002). Formation of protection layer during oxidation of Al-implanted TiN coating. Materials Transactions, 43(6), 1291-1297.

Formation of protection layer during oxidation of Al-implanted TiN coating. / Akhadejdamrong, Thananan; Mitsuo, Atsushi; Iwamoto, Chihiro; Yamamoto, Takahisa; Ikuhara, Yuichi; Aizawa, Tatsuhiko.

In: Materials Transactions, Vol. 43, No. 6, 06.2002, p. 1291-1297.

Research output: Contribution to journalArticle

Akhadejdamrong, T, Mitsuo, A, Iwamoto, C, Yamamoto, T, Ikuhara, Y & Aizawa, T 2002, 'Formation of protection layer during oxidation of Al-implanted TiN coating', Materials Transactions, vol. 43, no. 6, pp. 1291-1297.
Akhadejdamrong T, Mitsuo A, Iwamoto C, Yamamoto T, Ikuhara Y, Aizawa T. Formation of protection layer during oxidation of Al-implanted TiN coating. Materials Transactions. 2002 Jun;43(6):1291-1297.
Akhadejdamrong, Thananan ; Mitsuo, Atsushi ; Iwamoto, Chihiro ; Yamamoto, Takahisa ; Ikuhara, Yuichi ; Aizawa, Tatsuhiko. / Formation of protection layer during oxidation of Al-implanted TiN coating. In: Materials Transactions. 2002 ; Vol. 43, No. 6. pp. 1291-1297.
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