Formation of titanium and aluminum films by supersonic free-jet PVD method

Engineering & Materials Science

• Physical vapor deposition 99%
• Titanium 78%
• Aluminum 62%
• Evaporation 53%
• Metallic films 45%
• Nozzles 35%
• Gases 30%
• Coatings 20%
• Substrates 19%
• Vickers hardness 16%
• Helium 15%
• Diamonds 13%
• Mach number 13%
• Flow of gases 13%
• Adhesion 12%
• Vacuum 11%
• Agglomeration 11%
• Cracks 9%
• Metals 8%
• Hot Temperature 6%

Physics & Astronomy

• free jets 100%
• titanium 67%
• aluminum 55%
• chambers 32%
• evaporation 30%
• nozzles 28%
• gases 20%
• coating 18%
• atmospheres 14%
• Vickers hardness 11%
• outlets 11%
• agglomeration 11%
• electric power 10%
• test equipment 10%
• proportion 9%
• gas flow 9%
• voids 8%
• adhesion 8%
• diamonds 8%
• helium 7%
• cracks 7%
• heat 6%
• vacuum 6%
• metals 5%

Chemical Compounds

• Liquid Film 39%
• Evaporation 35%
• Nozzle 35%
• Velocity 25%
• Vickers Hardness 12%
• Coating Agent 12%
• Jet 10%
• Gas 10%
• Agglomeration 9%
• Diamond 9%
• Vacuum 8%
• Heat 7%
• Force 6%
• Flow 6%
• Pressure 5%
• Reduction 4%
• Metal 4%