Fully Planarized Multilevel Interconnection Using Selective SiO2 Deposition

T. Homma, T. Homma;T.Katoh;Y.Yamada;J.Shimizu;Y. Murao

Research output: Contribution to journalArticlepeer-review

13 Citations (Scopus)
Original languageEnglish
Pages (from-to)315-322
JournalNEC Research & Development
Volume32
Publication statusPublished - 1991 Jul 1

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