Fundamental Properties of 3D Microfabrication Using a Femto-second Laser

Mikio Yamanoi, Satoshi Wada, Masahiro Anzai, Ohmori Hitoshi Ohmori, Akitake Makinouchi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Micro scaled grooves and cavities are fabricated with the method of direct writing and superposing grooving in ambient air using femtosecond laser pulses and copper, aiming at establishing an industrially useful femtosecond laser processing machine to be able to fabricate three dimensional micro-scale structures, especially micro scaled molds, and processing techniques. The following items are demanded to make femtosecond laser processing machine an industrially useful tool. 1) There is no thermally influenced region around the area irradiated by the laser beam. 2) Surfaces irradiated laser beam are smooth. 3) Substances ablated to form are not attached on the surface of the work. In this study, fundamental properties of grooving and cavity processing are investigated experimentally, considering above items, especially eyeing on the items 1) and 2). As a result obtained in this research, the method of direct writing and superposing grooving havs a potential to fabricate micro scaled structure.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsI. Miyamoto, A. Ostendorf, K. Sugioka, H. Helvajian
Pages378-380
Number of pages3
Volume5063
DOIs
Publication statusPublished - 2003
Externally publishedYes
EventFourth International Symposium on Laser Precision Microfabrication - Munich, Germany
Duration: 2003 Jun 212003 Jun 24

Other

OtherFourth International Symposium on Laser Precision Microfabrication
CountryGermany
CityMunich
Period03/6/2103/6/24

Fingerprint

Microfabrication
grooving
Ultrashort pulses
Lasers
Processing
lasers
Laser beams
laser beams
cavities
Molds
grooves
Copper
copper
microstructure
Microstructure
air
Air
pulses

Keywords

  • 3D Microfabrication and Metal Processing
  • Athermal Processing
  • Femtosecond Laser
  • Laser Processing

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Yamanoi, M., Wada, S., Anzai, M., Hitoshi Ohmori, O., & Makinouchi, A. (2003). Fundamental Properties of 3D Microfabrication Using a Femto-second Laser. In I. Miyamoto, A. Ostendorf, K. Sugioka, & H. Helvajian (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 5063, pp. 378-380) https://doi.org/10.1117/12.540604

Fundamental Properties of 3D Microfabrication Using a Femto-second Laser. / Yamanoi, Mikio; Wada, Satoshi; Anzai, Masahiro; Hitoshi Ohmori, Ohmori; Makinouchi, Akitake.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / I. Miyamoto; A. Ostendorf; K. Sugioka; H. Helvajian. Vol. 5063 2003. p. 378-380.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Yamanoi, M, Wada, S, Anzai, M, Hitoshi Ohmori, O & Makinouchi, A 2003, Fundamental Properties of 3D Microfabrication Using a Femto-second Laser. in I Miyamoto, A Ostendorf, K Sugioka & H Helvajian (eds), Proceedings of SPIE - The International Society for Optical Engineering. vol. 5063, pp. 378-380, Fourth International Symposium on Laser Precision Microfabrication, Munich, Germany, 03/6/21. https://doi.org/10.1117/12.540604
Yamanoi M, Wada S, Anzai M, Hitoshi Ohmori O, Makinouchi A. Fundamental Properties of 3D Microfabrication Using a Femto-second Laser. In Miyamoto I, Ostendorf A, Sugioka K, Helvajian H, editors, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 5063. 2003. p. 378-380 https://doi.org/10.1117/12.540604
Yamanoi, Mikio ; Wada, Satoshi ; Anzai, Masahiro ; Hitoshi Ohmori, Ohmori ; Makinouchi, Akitake. / Fundamental Properties of 3D Microfabrication Using a Femto-second Laser. Proceedings of SPIE - The International Society for Optical Engineering. editor / I. Miyamoto ; A. Ostendorf ; K. Sugioka ; H. Helvajian. Vol. 5063 2003. pp. 378-380
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