Abstract
Micro scaled grooves and cavities are fabricated with the method of direct writing and superposing grooving in ambient air using femtosecond laser pulses and copper, aiming at establishing an industrially useful femtosecond laser processing machine to be able to fabricate three dimensional micro-scale structures, especially micro scaled molds, and processing techniques. The following items are demanded to make femtosecond laser processing machine an industrially useful tool. 1) There is no thermally influenced region around the area irradiated by the laser beam. 2) Surfaces irradiated laser beam are smooth. 3) Substances ablated to form are not attached on the surface of the work. In this study, fundamental properties of grooving and cavity processing are investigated experimentally, considering above items, especially eyeing on the items 1) and 2). As a result obtained in this research, the method of direct writing and superposing grooving havs a potential to fabricate micro scaled structure.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of SPIE - The International Society for Optical Engineering |
| Editors | I. Miyamoto, A. Ostendorf, K. Sugioka, H. Helvajian |
| Pages | 378-380 |
| Number of pages | 3 |
| Volume | 5063 |
| DOIs | |
| Publication status | Published - 2003 |
| Externally published | Yes |
| Event | Fourth International Symposium on Laser Precision Microfabrication - Munich, Germany Duration: 2003 Jun 21 → 2003 Jun 24 |
Other
| Other | Fourth International Symposium on Laser Precision Microfabrication |
|---|---|
| Country | Germany |
| City | Munich |
| Period | 03/6/21 → 03/6/24 |
Fingerprint
Keywords
- 3D Microfabrication and Metal Processing
- Athermal Processing
- Femtosecond Laser
- Laser Processing
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Condensed Matter Physics
Cite this
Fundamental Properties of 3D Microfabrication Using a Femto-second Laser. / Yamanoi, Mikio; Wada, Satoshi; Anzai, Masahiro; Hitoshi Ohmori, Ohmori; Makinouchi, Akitake.
Proceedings of SPIE - The International Society for Optical Engineering. ed. / I. Miyamoto; A. Ostendorf; K. Sugioka; H. Helvajian. Vol. 5063 2003. p. 378-380.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Fundamental Properties of 3D Microfabrication Using a Femto-second Laser
AU - Yamanoi, Mikio
AU - Wada, Satoshi
AU - Anzai, Masahiro
AU - Hitoshi Ohmori, Ohmori
AU - Makinouchi, Akitake
PY - 2003
Y1 - 2003
N2 - Micro scaled grooves and cavities are fabricated with the method of direct writing and superposing grooving in ambient air using femtosecond laser pulses and copper, aiming at establishing an industrially useful femtosecond laser processing machine to be able to fabricate three dimensional micro-scale structures, especially micro scaled molds, and processing techniques. The following items are demanded to make femtosecond laser processing machine an industrially useful tool. 1) There is no thermally influenced region around the area irradiated by the laser beam. 2) Surfaces irradiated laser beam are smooth. 3) Substances ablated to form are not attached on the surface of the work. In this study, fundamental properties of grooving and cavity processing are investigated experimentally, considering above items, especially eyeing on the items 1) and 2). As a result obtained in this research, the method of direct writing and superposing grooving havs a potential to fabricate micro scaled structure.
AB - Micro scaled grooves and cavities are fabricated with the method of direct writing and superposing grooving in ambient air using femtosecond laser pulses and copper, aiming at establishing an industrially useful femtosecond laser processing machine to be able to fabricate three dimensional micro-scale structures, especially micro scaled molds, and processing techniques. The following items are demanded to make femtosecond laser processing machine an industrially useful tool. 1) There is no thermally influenced region around the area irradiated by the laser beam. 2) Surfaces irradiated laser beam are smooth. 3) Substances ablated to form are not attached on the surface of the work. In this study, fundamental properties of grooving and cavity processing are investigated experimentally, considering above items, especially eyeing on the items 1) and 2). As a result obtained in this research, the method of direct writing and superposing grooving havs a potential to fabricate micro scaled structure.
KW - 3D Microfabrication and Metal Processing
KW - Athermal Processing
KW - Femtosecond Laser
KW - Laser Processing
UR - http://www.scopus.com/inward/record.url?scp=2342534465&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=2342534465&partnerID=8YFLogxK
U2 - 10.1117/12.540604
DO - 10.1117/12.540604
M3 - Conference contribution
AN - SCOPUS:2342534465
VL - 5063
SP - 378
EP - 380
BT - Proceedings of SPIE - The International Society for Optical Engineering
A2 - Miyamoto, I.
A2 - Ostendorf, A.
A2 - Sugioka, K.
A2 - Helvajian, H.
ER -