Fundamental Properties of 3D Microfabrication Using a Femto-second Laser

Mikio Yamanoi, Satoshi Wada, Masahiro Anzai, Ohmori Hitoshi Ohmori, Akitake Makinouchi

Research output: Contribution to journalConference article

Abstract

Micro scaled grooves and cavities are fabricated with the method of direct writing and superposing grooving in ambient air using femtosecond laser pulses and copper, aiming at establishing an industrially useful femtosecond laser processing machine to be able to fabricate three dimensional micro-scale structures, especially micro scaled molds, and processing techniques. The following items are demanded to make femtosecond laser processing machine an industrially useful tool. 1) There is no thermally influenced region around the area irradiated by the laser beam. 2) Surfaces irradiated laser beam are smooth. 3) Substances ablated to form are not attached on the surface of the work. In this study, fundamental properties of grooving and cavity processing are investigated experimentally, considering above items, especially eyeing on the items 1) and 2). As a result obtained in this research, the method of direct writing and superposing grooving havs a potential to fabricate micro scaled structure.

Original languageEnglish
Pages (from-to)378-380
Number of pages3
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume5063
DOIs
Publication statusPublished - 2003 Dec 1
EventFourth International Symposium on Laser Precision Microfabrication - Munich, Germany
Duration: 2003 Jun 212003 Jun 24

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Keywords

  • 3D Microfabrication and Metal Processing
  • Athermal Processing
  • Femtosecond Laser
  • Laser Processing

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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