Gas sensor using complete reflection at free edge of SH-SAW

Tooru Nomura; Atsushi Saitoh; Tooru Miyazaki

doi:10.1080/00150190211773

Gas sensor using complete reflection at free edge of SH-SAW

Tooru Nomura, Atsushi Saitoh, Tooru Miyazaki

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

A new gas sensor has been designed by using SH-SAW device. Shear horizontal mode surface acoustic wave (SH-SAW) has a unique characteristic of complete reflection at the free edges of the substrate. The SH-SAW are excited on a 36 YX LiTaO 3 and the right angle edge of the substrate has been used to reflect these waves. Both the phase and amplitude of the SH-SAW reflected from the edge were measured as a sensor response. Several experiments were performed to verify the edge reflection type SAW sensor in gas phase.

Original language	English
Pages (from-to)	113-118
Number of pages	6
Journal	Ferroelectrics
Volume	273
DOIs	https://doi.org/10.1080/00150190211773
Publication status	Published - 2002 Jan 1

Keywords

Reflecting SAW delay line
SAW sensor
SH-SAW
Sensor
Surface acoustic wave

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics

Access to Document

10.1080/00150190211773

Cite this

@article{2e4ccd14ff844896ac535a2ca81f8ed7,

title = "Gas sensor using complete reflection at free edge of SH-SAW",

abstract = "A new gas sensor has been designed by using SH-SAW device. Shear horizontal mode surface acoustic wave (SH-SAW) has a unique characteristic of complete reflection at the free edges of the substrate. The SH-SAW are excited on a 36 YX LiTaO 3 and the right angle edge of the substrate has been used to reflect these waves. Both the phase and amplitude of the SH-SAW reflected from the edge were measured as a sensor response. Several experiments were performed to verify the edge reflection type SAW sensor in gas phase.",

keywords = "Reflecting SAW delay line, SAW sensor, SH-SAW, Sensor, Surface acoustic wave",

author = "Tooru Nomura and Atsushi Saitoh and Tooru Miyazaki",

year = "2002",

month = jan,

day = "1",

doi = "10.1080/00150190211773",

language = "English",

volume = "273",

pages = "113--118",

journal = "Ferroelectrics",

issn = "0015-0193",

publisher = "Taylor and Francis Ltd.",

}

TY - JOUR

T1 - Gas sensor using complete reflection at free edge of SH-SAW

AU - Nomura, Tooru

AU - Saitoh, Atsushi

AU - Miyazaki, Tooru

PY - 2002/1/1

Y1 - 2002/1/1

N2 - A new gas sensor has been designed by using SH-SAW device. Shear horizontal mode surface acoustic wave (SH-SAW) has a unique characteristic of complete reflection at the free edges of the substrate. The SH-SAW are excited on a 36 YX LiTaO 3 and the right angle edge of the substrate has been used to reflect these waves. Both the phase and amplitude of the SH-SAW reflected from the edge were measured as a sensor response. Several experiments were performed to verify the edge reflection type SAW sensor in gas phase.

AB - A new gas sensor has been designed by using SH-SAW device. Shear horizontal mode surface acoustic wave (SH-SAW) has a unique characteristic of complete reflection at the free edges of the substrate. The SH-SAW are excited on a 36 YX LiTaO 3 and the right angle edge of the substrate has been used to reflect these waves. Both the phase and amplitude of the SH-SAW reflected from the edge were measured as a sensor response. Several experiments were performed to verify the edge reflection type SAW sensor in gas phase.

KW - Reflecting SAW delay line

KW - SAW sensor

KW - SH-SAW

KW - Sensor

KW - Surface acoustic wave

UR - http://www.scopus.com/inward/record.url?scp=33646203533&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33646203533&partnerID=8YFLogxK

U2 - 10.1080/00150190211773

DO - 10.1080/00150190211773

M3 - Article

AN - SCOPUS:33646203533

SN - 0015-0193

VL - 273

SP - 113

EP - 118

JO - Ferroelectrics

JF - Ferroelectrics

ER -

Gas sensor using complete reflection at free edge of SH-SAW

Abstract

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this