Gas sensor using complete reflection at free edge of SH-SAW

Tooru Nomura, Atsushi Saitoh, Tooru Miyazaki

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

A new gas sensor has been designed by using SH-SAW device. Shear horizontal mode surface acoustic wave (SH-SAW) has a unique characteristic of complete reflection at the free edges of the substrate. The SH-SAW are excited on a 36 YX LiTaO 3 and the right angle edge of the substrate has been used to reflect these waves. Both the phase and amplitude of the SH-SAW reflected from the edge were measured as a sensor response. Several experiments were performed to verify the edge reflection type SAW sensor in gas phase.

Original languageEnglish
Pages (from-to)113-118
Number of pages6
JournalFerroelectrics
Volume273
DOIs
Publication statusPublished - 2002 Jan 1

Keywords

  • Reflecting SAW delay line
  • SAW sensor
  • Sensor
  • SH-SAW
  • Surface acoustic wave

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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