Gas sensor using complete reflection at free edge of SH-SAW

Tooru Nomura, Atsushi Saitoh, Tooru Miyazaki

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

A new gas sensor has been designed by using SH-SAW device. Shear horizontal mode surface acoustic wave (SH-SAW) has a unique characteristic of complete reflection at the free edges of the substrate. The SH-SAW are excited on a 36 YX LiTaO 3 and the right angle edge of the substrate has been used to reflect these waves. Both the phase and amplitude of the SH-SAW reflected from the edge were measured as a sensor response. Several experiments were performed to verify the edge reflection type SAW sensor in gas phase.

Original languageEnglish
Title of host publicationFerroelectrics
Pages113-118
Number of pages6
Volume273
DOIs
Publication statusPublished - 2002 Jan 1

Fingerprint

Chemical sensors
Surface waves
Acoustic waves
shear
acoustics
sensors
gases
Acoustic surface wave devices
Sensors
Substrates
surface acoustic wave devices
reflected waves
Gases
vapor phases
Experiments

Keywords

  • Reflecting SAW delay line
  • SAW sensor
  • Sensor
  • SH-SAW
  • Surface acoustic wave

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials

Cite this

Nomura, T., Saitoh, A., & Miyazaki, T. (2002). Gas sensor using complete reflection at free edge of SH-SAW. In Ferroelectrics (Vol. 273, pp. 113-118) https://doi.org/10.1080/00150190211773

Gas sensor using complete reflection at free edge of SH-SAW. / Nomura, Tooru; Saitoh, Atsushi; Miyazaki, Tooru.

Ferroelectrics. Vol. 273 2002. p. 113-118.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Nomura, T, Saitoh, A & Miyazaki, T 2002, Gas sensor using complete reflection at free edge of SH-SAW. in Ferroelectrics. vol. 273, pp. 113-118. https://doi.org/10.1080/00150190211773
Nomura, Tooru ; Saitoh, Atsushi ; Miyazaki, Tooru. / Gas sensor using complete reflection at free edge of SH-SAW. Ferroelectrics. Vol. 273 2002. pp. 113-118
@inproceedings{2e4ccd14ff844896ac535a2ca81f8ed7,
title = "Gas sensor using complete reflection at free edge of SH-SAW",
abstract = "A new gas sensor has been designed by using SH-SAW device. Shear horizontal mode surface acoustic wave (SH-SAW) has a unique characteristic of complete reflection at the free edges of the substrate. The SH-SAW are excited on a 36 YX LiTaO 3 and the right angle edge of the substrate has been used to reflect these waves. Both the phase and amplitude of the SH-SAW reflected from the edge were measured as a sensor response. Several experiments were performed to verify the edge reflection type SAW sensor in gas phase.",
keywords = "Reflecting SAW delay line, SAW sensor, Sensor, SH-SAW, Surface acoustic wave",
author = "Tooru Nomura and Atsushi Saitoh and Tooru Miyazaki",
year = "2002",
month = "1",
day = "1",
doi = "10.1080/00150190211773",
language = "English",
volume = "273",
pages = "113--118",
booktitle = "Ferroelectrics",

}

TY - GEN

T1 - Gas sensor using complete reflection at free edge of SH-SAW

AU - Nomura, Tooru

AU - Saitoh, Atsushi

AU - Miyazaki, Tooru

PY - 2002/1/1

Y1 - 2002/1/1

N2 - A new gas sensor has been designed by using SH-SAW device. Shear horizontal mode surface acoustic wave (SH-SAW) has a unique characteristic of complete reflection at the free edges of the substrate. The SH-SAW are excited on a 36 YX LiTaO 3 and the right angle edge of the substrate has been used to reflect these waves. Both the phase and amplitude of the SH-SAW reflected from the edge were measured as a sensor response. Several experiments were performed to verify the edge reflection type SAW sensor in gas phase.

AB - A new gas sensor has been designed by using SH-SAW device. Shear horizontal mode surface acoustic wave (SH-SAW) has a unique characteristic of complete reflection at the free edges of the substrate. The SH-SAW are excited on a 36 YX LiTaO 3 and the right angle edge of the substrate has been used to reflect these waves. Both the phase and amplitude of the SH-SAW reflected from the edge were measured as a sensor response. Several experiments were performed to verify the edge reflection type SAW sensor in gas phase.

KW - Reflecting SAW delay line

KW - SAW sensor

KW - Sensor

KW - SH-SAW

KW - Surface acoustic wave

UR - http://www.scopus.com/inward/record.url?scp=33646203533&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33646203533&partnerID=8YFLogxK

U2 - 10.1080/00150190211773

DO - 10.1080/00150190211773

M3 - Conference contribution

VL - 273

SP - 113

EP - 118

BT - Ferroelectrics

ER -