Generation mechanism and in situ growth behavior of α-iron nanocrystals by electron beam induced deposition

Wei Zhang, Masayuki Shimojo, Masaki Takeguchi, Ren Chao Che, Kazuo Furuya

Research output: Contribution to journalArticle

20 Citations (Scopus)

Abstract

The nanofabrication of iron-containing deposits with a precursor of Fe(CO)5 and the growth of Α-Fe nanocrystals by Electron Beam Induced Deposition was investigated. The nanocryatals were formed by irradiation of a position-fixed focused electron beam for 1200s. The results show that Fe(CO)5 molecules decomposed and debonded under electron beam formed target deposits contains amorphous Fe, C, and O. The Fe(CO)5 bond dissociation energy is 6eV and the threshold energy to dissociate C-O bond is 12 eV. The secondary electrons (SE) with 50 eV energy are generated by inelastic scattering of incident primary electrons (PE). The SE can dissociate the gas molecules to deposit the Fe, C, and O molecules in the target, which develops the target deposits into a tip structure. The growth rate of Fe nanocrystals shows that its size is linearly dependent on the irradiation time and their growth speed is 0.08 nm/s.

Original languageEnglish
Pages (from-to)711-714
Number of pages4
JournalAdvanced Engineering Materials
Volume8
Issue number8
DOIs
Publication statusPublished - 2006 Aug
Externally publishedYes

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Nanocrystals
Electron beams
nanocrystals
Deposits
Iron
deposits
electron beams
iron
Molecules
Electrons
Irradiation
molecules
Inelastic scattering
irradiation
electrons
nanofabrication
Nanotechnology
energy
inelastic scattering
Gases

ASJC Scopus subject areas

  • Materials Science (miscellaneous)

Cite this

Generation mechanism and in situ growth behavior of α-iron nanocrystals by electron beam induced deposition. / Zhang, Wei; Shimojo, Masayuki; Takeguchi, Masaki; Che, Ren Chao; Furuya, Kazuo.

In: Advanced Engineering Materials, Vol. 8, No. 8, 08.2006, p. 711-714.

Research output: Contribution to journalArticle

Zhang, Wei ; Shimojo, Masayuki ; Takeguchi, Masaki ; Che, Ren Chao ; Furuya, Kazuo. / Generation mechanism and in situ growth behavior of α-iron nanocrystals by electron beam induced deposition. In: Advanced Engineering Materials. 2006 ; Vol. 8, No. 8. pp. 711-714.
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