Generation of strong magnetic field using 60 mmφ superconducting bulk magnet and its application to magnetron sputtering device

Y. Yanagi, T. Matsuda, H. Hazama, K. Yokouchi, M. Yoshikawa, Y. Itoh, Tetsuo Oka, H. Ikuta, U. Mizutani

Research output: Contribution to journalConference article

32 Citations (Scopus)

Abstract

To make a practical application of a superconducting bulk magnet (SBM), it is necessary that the SBM generates a strong and stable magnetic field in a working space and the magnet can be handled without any special care that would be needed because of the use of a superconductor. To satisfy these requirements, we have designed a portable and user-friendly magnet system consisting of a small air-cooled type refrigerator and a bulk superconductor. By using the stress-controlling magnetization technique, we could achieve a magnetic flux density of 8.0 T on the bulk surface and 6.5 T over the vacuum chamber surface of the refrigerator, when a 60 mmφ Gd-Ba-Cu-O bulk superconductor reinforced with a 5 mm thick stainless steel ring was magnetized by field cooling in 8.5 T to 27 K. We have confirmed that the bulk magnet system coupled with a battery is quite portable and can be delivered to any location by using a car with an electric power outlet in the cabin. We have constructed a magnetron sputtering device that employs a bulk magnet system delivered from the place of magnetization by this method. This sputtering device exhibits several unique features such as deposition at a very low Ar gas pressure because the magnetic field is 20 times stronger than that obtained by a conventional device in the working space.

Original languageEnglish
Pages (from-to)764-769
Number of pages6
JournalPhysica C: Superconductivity and its Applications
Volume426-431
Issue numberI
DOIs
Publication statusPublished - 2005 Oct 1
Externally publishedYes
EventProceedings of the 17th International Symposium on Superconductivity (ISS 2004) Advances in Supeconductivity -
Duration: 2004 Nov 232004 Nov 25

Fingerprint

Magnetron sputtering
Magnets
magnetron sputtering
magnets
Magnetic fields
magnetic fields
Superconducting materials
Refrigerators
refrigerators
Magnetization
cabins
magnetization
Stainless Steel
Magnetic flux
vacuum chambers
outlets
electric power
gas pressure
Sputtering
magnetic flux

Keywords

  • Bulk superconductor
  • Delivery of a bulk magnet
  • Magnetron sputtering device
  • Metal-ring reinforcement
  • Stress-controlling magnetization

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Energy Engineering and Power Technology
  • Electrical and Electronic Engineering

Cite this

Generation of strong magnetic field using 60 mmφ superconducting bulk magnet and its application to magnetron sputtering device. / Yanagi, Y.; Matsuda, T.; Hazama, H.; Yokouchi, K.; Yoshikawa, M.; Itoh, Y.; Oka, Tetsuo; Ikuta, H.; Mizutani, U.

In: Physica C: Superconductivity and its Applications, Vol. 426-431, No. I, 01.10.2005, p. 764-769.

Research output: Contribution to journalConference article

Yanagi, Y. ; Matsuda, T. ; Hazama, H. ; Yokouchi, K. ; Yoshikawa, M. ; Itoh, Y. ; Oka, Tetsuo ; Ikuta, H. ; Mizutani, U. / Generation of strong magnetic field using 60 mmφ superconducting bulk magnet and its application to magnetron sputtering device. In: Physica C: Superconductivity and its Applications. 2005 ; Vol. 426-431, No. I. pp. 764-769.
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