Graded TiN coating by supersonic free-jet PVD combined with reactive plasma

Atsushi Yumoto, Takahisa Yamamoto, Fujio Hiroki, Ichiro Shiota, Naotake Niwa

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

Ceramic coating is a very popular technology for improving the properties of structural materials. A titanium nitride (TIN) coating is a typical example and has been widely applied to cutting tools, electronic devices and many other fields utilizing its superior physical properties. This paper sought to produce a graded TiN coating on a Ti substrate by combining Supersonic Free-Jet PVD (SFJ-PVD) with a reactive plasma-metal reaction technique. The authors have developed SFJ-PVD as a new coating method in which a coating film is formed by depositing nanoparticles with very high velocity onto a substrate. SFJ-PVD can provide a high deposition rate and thick film coating. Gradually changing the nitrogen flow rate during deposition produces a graded TiN coating, in which composition changes gradually from pure Ti to TiN. A monolithic TiN coating is also produced with SFJ-PVD. XRD analysis of the graded TiN detected peaks for Ti, Ti2N and TiN, while only a TiN peak is observed in the monolithic TiN coating. EPMA analysis of a graded coating reveals a gradual compositional change from pure Ti to TiN. Few pores or cracks are observed in a graded TiN or in a monolithic TiN formed under the optimized conditions of SFJ-PVD.

Original languageEnglish
Pages (from-to)2932-2994
Number of pages63
JournalMaterials Transactions
Volume43
Issue number11
Publication statusPublished - 2002 Nov
Externally publishedYes

Fingerprint

free jets
Physical vapor deposition
Plasmas
coatings
Coatings
ceramic coatings
titanium nitrides
Titanium nitride
Ceramic coatings
Electron probe microanalysis
Substrates
Cutting tools
thick films
Deposition rates
coating
Thick films
cracks
flow velocity
physical properties
Nitrogen

Keywords

  • Functionally graded material
  • Nanoparticle
  • Physical vapor deposition
  • Supersonic gas flow
  • Titanium nitride

ASJC Scopus subject areas

  • Materials Science(all)
  • Metals and Alloys

Cite this

Yumoto, A., Yamamoto, T., Hiroki, F., Shiota, I., & Niwa, N. (2002). Graded TiN coating by supersonic free-jet PVD combined with reactive plasma. Materials Transactions, 43(11), 2932-2994.

Graded TiN coating by supersonic free-jet PVD combined with reactive plasma. / Yumoto, Atsushi; Yamamoto, Takahisa; Hiroki, Fujio; Shiota, Ichiro; Niwa, Naotake.

In: Materials Transactions, Vol. 43, No. 11, 11.2002, p. 2932-2994.

Research output: Contribution to journalArticle

Yumoto, A, Yamamoto, T, Hiroki, F, Shiota, I & Niwa, N 2002, 'Graded TiN coating by supersonic free-jet PVD combined with reactive plasma', Materials Transactions, vol. 43, no. 11, pp. 2932-2994.
Yumoto A, Yamamoto T, Hiroki F, Shiota I, Niwa N. Graded TiN coating by supersonic free-jet PVD combined with reactive plasma. Materials Transactions. 2002 Nov;43(11):2932-2994.
Yumoto, Atsushi ; Yamamoto, Takahisa ; Hiroki, Fujio ; Shiota, Ichiro ; Niwa, Naotake. / Graded TiN coating by supersonic free-jet PVD combined with reactive plasma. In: Materials Transactions. 2002 ; Vol. 43, No. 11. pp. 2932-2994.
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