Grain growth enhancement of electroplated copper film by supercritical annealing

Kazuyoshi Ueno, Yuji Shimada, Shigeru Yomogida, Seishi Akahori, Tomohiko Yamamoto, Takamasa Yamaguchi, Yoshinori Aoki, Akiko Matsuyama, Takashi Yata, Hideki Hashimoto

Research output: Contribution to journalArticle

2 Citations (Scopus)

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Engineering & Materials Science

Physics & Astronomy