Graphical Approach to Sensitive Detection of Interface Defects in Thin Oxide MOS Capacitors

K. Kita, Y. Osaka, K. Kyuno, S. Takagi, K. Takasaki, M. Kubota, Y. Shimamoto, A. Toriumi

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)206-214
JournalProceedings of the 2nd International Semiconductor Technology Conference (ISTC-2)
Publication statusPublished - 2002 Sep 1

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