| Original language | English |
|---|---|
| Pages (from-to) | 206-214 |
| Journal | Proceedings of the 2nd International Semiconductor Technology Conference (ISTC-2) |
| Publication status | Published - 2002 Sep 1 |
Cite this
Kita, K., Osaka, Y., Kyuno, K., Takagi, S., Takasaki, K., Kubota, M., ... Toriumi, A. (2002). Graphical Approach to Sensitive Detection of Interface Defects in Thin Oxide MOS Capacitors. Proceedings of the 2nd International Semiconductor Technology Conference (ISTC-2), 206-214.
Graphical Approach to Sensitive Detection of Interface Defects in Thin Oxide MOS Capacitors. / Kita, K.; Osaka, Y.; Kyuno, K.; Takagi, S.; Takasaki, K.; Kubota, M.; Shimamoto, Y.; Toriumi, A.
In: Proceedings of the 2nd International Semiconductor Technology Conference (ISTC-2), 01.09.2002, p. 206-214.Research output: Contribution to journal › Article
Kita, K, Osaka, Y, Kyuno, K, Takagi, S, Takasaki, K, Kubota, M, Shimamoto, Y & Toriumi, A 2002, 'Graphical Approach to Sensitive Detection of Interface Defects in Thin Oxide MOS Capacitors', Proceedings of the 2nd International Semiconductor Technology Conference (ISTC-2), pp. 206-214.
Kita K, Osaka Y, Kyuno K, Takagi S, Takasaki K, Kubota M et al. Graphical Approach to Sensitive Detection of Interface Defects in Thin Oxide MOS Capacitors. Proceedings of the 2nd International Semiconductor Technology Conference (ISTC-2). 2002 Sep 1;206-214.
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AU - Takasaki, K.
AU - Kubota, M.
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AU - Toriumi, A.
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