Graphical Approach to Sensitive Detection of Interface Defects in Thin Oxide MOS Capacitors

K. Kita, Y. Osaka, K. Kyuno, S. Takagi, K. Takasaki, M. Kubota, Y. Shimamoto, A. Toriumi

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	206-214
Journal	Proceedings of the 2nd International Semiconductor Technology Conference (ISTC-2)
Publication status	Published - 2002 Sep 1

Cite this

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title = "Graphical Approach to Sensitive Detection of Interface Defects in Thin Oxide MOS Capacitors",

author = "K. Kita and Y. Osaka and K. Kyuno and S. Takagi and K. Takasaki and M. Kubota and Y. Shimamoto and A. Toriumi",

year = "2002",

month = sep,

day = "1",

language = "English",

pages = "206--214",

journal = "Proceedings of the 2nd International Semiconductor Technology Conference (ISTC-2)",

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TY - JOUR

T1 - Graphical Approach to Sensitive Detection of Interface Defects in Thin Oxide MOS Capacitors

AU - Kita, K.

AU - Osaka, Y.

AU - Kyuno, K.

AU - Takagi, S.

AU - Takasaki, K.

AU - Kubota, M.

AU - Shimamoto, Y.

AU - Toriumi, A.

PY - 2002/9/1

Y1 - 2002/9/1

M3 - Article

SP - 206

EP - 214

JO - Proceedings of the 2nd International Semiconductor Technology Conference (ISTC-2)

JF - Proceedings of the 2nd International Semiconductor Technology Conference (ISTC-2)

ER -