Graphical Approach to Sensitive Detection of Interface Defects in Thin Oxide MOS Capacitors

K. Kita, Y. Osaka, K. Kyuno, S. Takagi, K. Takasaki, M. Kubota, Y. Shimamoto, A. Toriumi

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)206-214
JournalProceedings of the 2nd International Semiconductor Technology Conference (ISTC-2)
Publication statusPublished - 2002 Sep 1

Cite this

Graphical Approach to Sensitive Detection of Interface Defects in Thin Oxide MOS Capacitors. / Kita, K.; Osaka, Y.; Kyuno, K.; Takagi, S.; Takasaki, K.; Kubota, M.; Shimamoto, Y.; Toriumi, A.

In: Proceedings of the 2nd International Semiconductor Technology Conference (ISTC-2), 01.09.2002, p. 206-214.

Research output: Contribution to journalArticle

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