Graphical Approach to Sensitive Detection of Interface Defects in Thin Oxide MOS Capacitors

K. Kita, Y. Osaka, K. Kyuno, S. Takagi, K. Takasaki, M. Kubota, Y. Shimamoto, A. Toriumi

Research output: Contribution to journal › Article

Original language	English
Pages (from-to)	206-214
Journal	Proceedings of the 2nd International Semiconductor Technology Conference (ISTC-2)
Publication status	Published - 2002 Sep 1

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title = "Graphical Approach to Sensitive Detection of Interface Defects in Thin Oxide MOS Capacitors",

author = "K. Kita and Y. Osaka and K. Kyuno and S. Takagi and K. Takasaki and M. Kubota and Y. Shimamoto and A. Toriumi",

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AU - Kita, K.

AU - Osaka, Y.

AU - Kyuno, K.

AU - Takagi, S.

AU - Takasaki, K.

AU - Kubota, M.

AU - Shimamoto, Y.

AU - Toriumi, A.

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JO - Proceedings of the 2nd International Semiconductor Technology Conference (ISTC-2)

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