Original language | English |
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Pages (from-to) | 206-214 |
Journal | Proceedings of the 2nd International Semiconductor Technology Conference (ISTC-2) |
Publication status | Published - 2002 Sep 1 |
Graphical Approach to Sensitive Detection of Interface Defects in Thin Oxide MOS Capacitors
K. Kita, Y. Osaka, K. Kyuno, S. Takagi, K. Takasaki, M. Kubota, Y. Shimamoto, A. Toriumi
Research output: Contribution to journal › Article › peer-review