Growth mechanism difference of sputtered HfO2 on Ge and on Si

Koji Kita, Kentaro Kyuno, Akira Toriumi

Research output: Contribution to journalArticle

83 Citations (Scopus)

Fingerprint Dive into the research topics of 'Growth mechanism difference of sputtered HfO<sub>2</sub> on Ge and on Si'. Together they form a unique fingerprint.

Physics & Astronomy