Heat-Resistant co-w catalytic metals for multilayer graphene chemical vapor deposition

Kazuyoshi Ueno, Yusuke Karasawa, Satoru Kuwahara, Shotaro Baba, Hitoshi Hanai, Yuichi Yamazaki, Naoshi Sakuma, Akihiro Kajita, Tadashi Sakai

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

Multilayer graphene (MLG) is expected to be a low-resistance and high-reliability interconnect material replacing copper (Cu) in nanoscale interconnects. Chemical vapor deposition (CVD) on catalytic metals is expected as a practical method for MLG deposition. To obtain high-quality MLG films without catalyst agglomeration by CVD, heat-resistant Co-W catalytic metals were investigated. The agglomeration of the Co-W catalytic metals was suppressed by increasing the W composition; however, MLG deposition was suppressed at the same time. The effects of W addition on the MLG growth were discussed from the viewpoints of the crystallographic change of the Co-W catalysts and chemical reactions. It was found that the Co grain size was reduced and the fcc Co formation was suppressed by W addition. In addition, graphite formation was supposed to be suppressed by W addition owing to the formation of phases other than fcc Co according to the Co-W-C phase diagram. With the optimum W concentration, MLG crystallinity was improved by high-temperature CVD using the heat-resistant Co-W catalytic metals (0.7 at. %) without agglomeration, compared with that in the case of using pure-Co catalysts.

Original languageEnglish
Article number04CB04
JournalJapanese Journal of Applied Physics
Volume52
Issue number4 PART 2
DOIs
Publication statusPublished - 2013 Apr

Fingerprint

Graphene
Chemical vapor deposition
graphene
Multilayers
vapor deposition
heat
agglomeration
Metals
metals
Agglomeration
catalysts
Catalysts
low resistance
Phase diagrams
Hot Temperature
Chemical reactions
crystallinity
chemical reactions
Graphite
graphite

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Ueno, K., Karasawa, Y., Kuwahara, S., Baba, S., Hanai, H., Yamazaki, Y., ... Sakai, T. (2013). Heat-Resistant co-w catalytic metals for multilayer graphene chemical vapor deposition. Japanese Journal of Applied Physics, 52(4 PART 2), [04CB04]. https://doi.org/10.7567/JJAP.52.04CB04

Heat-Resistant co-w catalytic metals for multilayer graphene chemical vapor deposition. / Ueno, Kazuyoshi; Karasawa, Yusuke; Kuwahara, Satoru; Baba, Shotaro; Hanai, Hitoshi; Yamazaki, Yuichi; Sakuma, Naoshi; Kajita, Akihiro; Sakai, Tadashi.

In: Japanese Journal of Applied Physics, Vol. 52, No. 4 PART 2, 04CB04, 04.2013.

Research output: Contribution to journalArticle

Ueno, K, Karasawa, Y, Kuwahara, S, Baba, S, Hanai, H, Yamazaki, Y, Sakuma, N, Kajita, A & Sakai, T 2013, 'Heat-Resistant co-w catalytic metals for multilayer graphene chemical vapor deposition', Japanese Journal of Applied Physics, vol. 52, no. 4 PART 2, 04CB04. https://doi.org/10.7567/JJAP.52.04CB04
Ueno, Kazuyoshi ; Karasawa, Yusuke ; Kuwahara, Satoru ; Baba, Shotaro ; Hanai, Hitoshi ; Yamazaki, Yuichi ; Sakuma, Naoshi ; Kajita, Akihiro ; Sakai, Tadashi. / Heat-Resistant co-w catalytic metals for multilayer graphene chemical vapor deposition. In: Japanese Journal of Applied Physics. 2013 ; Vol. 52, No. 4 PART 2.
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