TY - GEN
T1 - High crystallinity multilayer graphene deposited by a low-temperature CVD using Ni catalyst with applying current
AU - Akimoto, Tomoki
AU - Ueno, Kazuyoshi
N1 - Funding Information:
This work was supported by JSPS KAKENHI Grant Number JP 18K 04289. This work was also supported by SIT Research Center for Green Innovation. The authors thank H. Kawakami for discussion and help.
Publisher Copyright:
© 2019 IEEE.
PY - 2019/3
Y1 - 2019/3
N2 - To achieve a low temperature deposition of high crystalline multilayer graphene (MLG), the effect of applying current to the catalyst layer was investigated in MLG-CVD using Ni catalyst. When the substrate temperature was varied at a fixed current, the MLG crystallinity was improved as the temperature became lower, and the G/D ratio of 40 was obtained at 464 °C. By optimizing the precursor flow-rate and deposition time, complete surface coverage was obtained at 490 °C.
AB - To achieve a low temperature deposition of high crystalline multilayer graphene (MLG), the effect of applying current to the catalyst layer was investigated in MLG-CVD using Ni catalyst. When the substrate temperature was varied at a fixed current, the MLG crystallinity was improved as the temperature became lower, and the G/D ratio of 40 was obtained at 464 °C. By optimizing the precursor flow-rate and deposition time, complete surface coverage was obtained at 490 °C.
KW - CVD
KW - current
KW - multilayer graphene
UR - http://www.scopus.com/inward/record.url?scp=85067805776&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85067805776&partnerID=8YFLogxK
U2 - 10.1109/EDTM.2019.8731128
DO - 10.1109/EDTM.2019.8731128
M3 - Conference contribution
AN - SCOPUS:85067805776
T3 - 2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019
SP - 351
EP - 353
BT - 2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019
Y2 - 12 March 2019 through 15 March 2019
ER -