High precision adaptive control for piezo-actuated stage

Xinkai Chen, Toshikuni Ozaki

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The piezo-actuated stage is composed of a piezo electric actuator (PEA) and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control of the piezo-actuated stage is a challenging task. This paper discusses the high precision adaptive control for the piezo-actuated stage, where the hysteresis is described by Prandtl-Ishlinskii model. Only the parameters which are directly needed in the controller design are estimated. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.

Original languageEnglish
Title of host publication2010 IEEE International Conference on Robotics and Biomimetics, ROBIO 2010
Pages1440-1445
Number of pages6
DOIs
Publication statusPublished - 2010
Event2010 IEEE International Conference on Robotics and Biomimetics, ROBIO 2010 - Tianjin
Duration: 2010 Dec 142010 Dec 18

Other

Other2010 IEEE International Conference on Robotics and Biomimetics, ROBIO 2010
CityTianjin
Period10/12/1410/12/18

Fingerprint

Piezoelectric actuators
Hysteresis
Friction
Controllers

ASJC Scopus subject areas

  • Artificial Intelligence
  • Biotechnology
  • Human-Computer Interaction

Cite this

Chen, X., & Ozaki, T. (2010). High precision adaptive control for piezo-actuated stage. In 2010 IEEE International Conference on Robotics and Biomimetics, ROBIO 2010 (pp. 1440-1445). [5723541] https://doi.org/10.1109/ROBIO.2010.5723541

High precision adaptive control for piezo-actuated stage. / Chen, Xinkai; Ozaki, Toshikuni.

2010 IEEE International Conference on Robotics and Biomimetics, ROBIO 2010. 2010. p. 1440-1445 5723541.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Chen, X & Ozaki, T 2010, High precision adaptive control for piezo-actuated stage. in 2010 IEEE International Conference on Robotics and Biomimetics, ROBIO 2010., 5723541, pp. 1440-1445, 2010 IEEE International Conference on Robotics and Biomimetics, ROBIO 2010, Tianjin, 10/12/14. https://doi.org/10.1109/ROBIO.2010.5723541
Chen X, Ozaki T. High precision adaptive control for piezo-actuated stage. In 2010 IEEE International Conference on Robotics and Biomimetics, ROBIO 2010. 2010. p. 1440-1445. 5723541 https://doi.org/10.1109/ROBIO.2010.5723541
Chen, Xinkai ; Ozaki, Toshikuni. / High precision adaptive control for piezo-actuated stage. 2010 IEEE International Conference on Robotics and Biomimetics, ROBIO 2010. 2010. pp. 1440-1445
@inproceedings{ce19c48561f64393b4a1f62b0a11d235,
title = "High precision adaptive control for piezo-actuated stage",
abstract = "The piezo-actuated stage is composed of a piezo electric actuator (PEA) and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control of the piezo-actuated stage is a challenging task. This paper discusses the high precision adaptive control for the piezo-actuated stage, where the hysteresis is described by Prandtl-Ishlinskii model. Only the parameters which are directly needed in the controller design are estimated. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.",
author = "Xinkai Chen and Toshikuni Ozaki",
year = "2010",
doi = "10.1109/ROBIO.2010.5723541",
language = "English",
isbn = "9781424493173",
pages = "1440--1445",
booktitle = "2010 IEEE International Conference on Robotics and Biomimetics, ROBIO 2010",

}

TY - GEN

T1 - High precision adaptive control for piezo-actuated stage

AU - Chen, Xinkai

AU - Ozaki, Toshikuni

PY - 2010

Y1 - 2010

N2 - The piezo-actuated stage is composed of a piezo electric actuator (PEA) and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control of the piezo-actuated stage is a challenging task. This paper discusses the high precision adaptive control for the piezo-actuated stage, where the hysteresis is described by Prandtl-Ishlinskii model. Only the parameters which are directly needed in the controller design are estimated. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.

AB - The piezo-actuated stage is composed of a piezo electric actuator (PEA) and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control of the piezo-actuated stage is a challenging task. This paper discusses the high precision adaptive control for the piezo-actuated stage, where the hysteresis is described by Prandtl-Ishlinskii model. Only the parameters which are directly needed in the controller design are estimated. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.

UR - http://www.scopus.com/inward/record.url?scp=79952957532&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=79952957532&partnerID=8YFLogxK

U2 - 10.1109/ROBIO.2010.5723541

DO - 10.1109/ROBIO.2010.5723541

M3 - Conference contribution

SN - 9781424493173

SP - 1440

EP - 1445

BT - 2010 IEEE International Conference on Robotics and Biomimetics, ROBIO 2010

ER -