High precision adaptive control for piezo-actuated stage

T. Ozaki, X. Chen

Research output: Contribution to journalArticle

Original languageEnglish
JournalProc. 2010 IEEE International Conference on Robotics and Biomimetics (ROBIO2010)
Publication statusPublished - 2010 Dec 17

Cite this

@article{0bacab6e3e8946e59dfa6385c7d7b2e1,
title = "High precision adaptive control for piezo-actuated stage",
author = "T. Ozaki and X. Chen",
year = "2010",
month = "12",
day = "17",
language = "English",
journal = "Proc. 2010 IEEE International Conference on Robotics and Biomimetics (ROBIO2010)",

}

TY - JOUR

T1 - High precision adaptive control for piezo-actuated stage

AU - Ozaki, T.

AU - Chen, X.

PY - 2010/12/17

Y1 - 2010/12/17

M3 - Article

JO - Proc. 2010 IEEE International Conference on Robotics and Biomimetics (ROBIO2010)

JF - Proc. 2010 IEEE International Conference on Robotics and Biomimetics (ROBIO2010)

ER -