High precision adaptive control for XY-table driven by piezo-actuator

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

The XY-table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the XY-table is a challenging task. This paper discusses the high precision adaptive control for the XY-table, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.

Original languageEnglish
Title of host publication2011 International Conference on Advanced Mechatronic Systems, ICAMechS 2011 - Final Program
Pages466-471
Number of pages6
Publication statusPublished - 2011 Oct 12
Event2011 International Conference on Advanced Mechatronic Systems, ICAMechS 2011 - Zhengzhou, China
Duration: 2011 Aug 112011 Aug 13

Publication series

Name2011 International Conference on Advanced Mechatronic Systems, ICAMechS 2011 - Final Program

Conference

Conference2011 International Conference on Advanced Mechatronic Systems, ICAMechS 2011
CountryChina
CityZhengzhou
Period11/8/1111/8/13

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering

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  • Cite this

    Chen, X. (2011). High precision adaptive control for XY-table driven by piezo-actuator. In 2011 International Conference on Advanced Mechatronic Systems, ICAMechS 2011 - Final Program (pp. 466-471). [6024938] (2011 International Conference on Advanced Mechatronic Systems, ICAMechS 2011 - Final Program).