High precision control for nano-stage driven by magnetostrictive actuator

Xinkai Chen, Chun Yi Su

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The nano-stage driven by magnetostrictive actuator is composed of a magnetostrictive actuator and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the magnetostrictive actuator and the friction behavior in the PM, the accurate position control of the nano-stage is a challenging task. This paper discusses the high precision control for the magnetostrictive nano-stage, where the hysteresis is described by Preisach model. The proposed control law ensures the zero output tracking of the controlled stage. Experimental results show the effectiveness of the proposed method.

Original languageEnglish
Title of host publicationLecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics)
Pages666-677
Number of pages12
Volume8103 LNAI
EditionPART 2
DOIs
Publication statusPublished - 2013
Event6th International Conference on Intelligent Robotics and Applications, ICIRA 2013 - Busan
Duration: 2013 Sep 252013 Sep 28

Publication series

NameLecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics)
NumberPART 2
Volume8103 LNAI
ISSN (Print)03029743
ISSN (Electronic)16113349

Other

Other6th International Conference on Intelligent Robotics and Applications, ICIRA 2013
CityBusan
Period13/9/2513/9/28

Fingerprint

Actuators
Position control
Hysteresis
Friction

Keywords

  • hysteresis
  • magnetostrictive actuator
  • Nano-stage
  • Preisach model

ASJC Scopus subject areas

  • Computer Science(all)
  • Theoretical Computer Science

Cite this

Chen, X., & Su, C. Y. (2013). High precision control for nano-stage driven by magnetostrictive actuator. In Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics) (PART 2 ed., Vol. 8103 LNAI, pp. 666-677). (Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics); Vol. 8103 LNAI, No. PART 2). https://doi.org/10.1007/978-3-642-40849-6-66

High precision control for nano-stage driven by magnetostrictive actuator. / Chen, Xinkai; Su, Chun Yi.

Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics). Vol. 8103 LNAI PART 2. ed. 2013. p. 666-677 (Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics); Vol. 8103 LNAI, No. PART 2).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Chen, X & Su, CY 2013, High precision control for nano-stage driven by magnetostrictive actuator. in Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics). PART 2 edn, vol. 8103 LNAI, Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics), no. PART 2, vol. 8103 LNAI, pp. 666-677, 6th International Conference on Intelligent Robotics and Applications, ICIRA 2013, Busan, 13/9/25. https://doi.org/10.1007/978-3-642-40849-6-66
Chen X, Su CY. High precision control for nano-stage driven by magnetostrictive actuator. In Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics). PART 2 ed. Vol. 8103 LNAI. 2013. p. 666-677. (Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics); PART 2). https://doi.org/10.1007/978-3-642-40849-6-66
Chen, Xinkai ; Su, Chun Yi. / High precision control for nano-stage driven by magnetostrictive actuator. Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics). Vol. 8103 LNAI PART 2. ed. 2013. pp. 666-677 (Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics); PART 2).
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