High precision control for nano-stage driven by magnetostrictive actuator

Xinkai Chen, Chun Yi Su

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The nano-stage driven by magnetostrictive actuator is composed of a magnetostrictive actuator and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the magnetostrictive actuator and the friction behavior in the PM, the accurate position control of the nano-stage is a challenging task. This paper discusses the high precision control for the magnetostrictive nano-stage, where the hysteresis is described by Preisach model. The proposed control law ensures the zero output tracking of the controlled stage. Experimental results show the effectiveness of the proposed method.

Original languageEnglish
Title of host publicationIntelligent Robotics and Applications - 6th International Conference, ICIRA 2013, Proceedings
Pages666-677
Number of pages12
EditionPART 2
DOIs
Publication statusPublished - 2013 Oct 7
Event6th International Conference on Intelligent Robotics and Applications, ICIRA 2013 - Busan, Korea, Republic of
Duration: 2013 Sep 252013 Sep 28

Publication series

NameLecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics)
NumberPART 2
Volume8103 LNAI
ISSN (Print)0302-9743
ISSN (Electronic)1611-3349

Conference

Conference6th International Conference on Intelligent Robotics and Applications, ICIRA 2013
CountryKorea, Republic of
CityBusan
Period13/9/2513/9/28

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Keywords

  • Nano-stage
  • Preisach model
  • hysteresis
  • magnetostrictive actuator

ASJC Scopus subject areas

  • Theoretical Computer Science
  • Computer Science(all)

Cite this

Chen, X., & Su, C. Y. (2013). High precision control for nano-stage driven by magnetostrictive actuator. In Intelligent Robotics and Applications - 6th International Conference, ICIRA 2013, Proceedings (PART 2 ed., pp. 666-677). (Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics); Vol. 8103 LNAI, No. PART 2). https://doi.org/10.1007/978-3-642-40849-6-66