High precision control for piezo-actuated positioners

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

The piezo-actuated nano-positioner is composed of a piezo electric actuator (PEA) and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the PEA and the friction behavior in the PM, the accurate position control of the piezo-actuated stage is a challenging task. This paper discusses the adaptive sliding mode control for the piezo-actuated nano-positioner, where the hysteresis is described by Prandtl-Ishlinskii model. This paper tries to fuse the hysteresis model with the adaptive control techniques, where the real value of the parameters of the stage need neither to be identified nor to be measured. The proposed control law ensures the global stability of the controlled nano-positioner, and the position error can be controlled to be as small as required by choosing the design parameters. Experimental results show the effectiveness of the proposed method.

Original languageEnglish
Title of host publication2009 IEEE International Conference on Mechatronics and Automation, ICMA 2009
Pages966-971
Number of pages6
DOIs
Publication statusPublished - 2009 Dec 1
Event2009 IEEE International Conference on Mechatronics and Automation, ICMA 2009 - Changchun, China
Duration: 2009 Aug 92009 Aug 12

Publication series

Name2009 IEEE International Conference on Mechatronics and Automation, ICMA 2009

Conference

Conference2009 IEEE International Conference on Mechatronics and Automation, ICMA 2009
CountryChina
CityChangchun
Period09/8/909/8/12

Keywords

  • Hysteresis
  • Piezo electric actuator
  • Positioner
  • Prandtl-Ishlinskii model

ASJC Scopus subject areas

  • Computer Vision and Pattern Recognition
  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Chen, X. (2009). High precision control for piezo-actuated positioners. In 2009 IEEE International Conference on Mechatronics and Automation, ICMA 2009 (pp. 966-971). [5245966] (2009 IEEE International Conference on Mechatronics and Automation, ICMA 2009). https://doi.org/10.1109/ICMA.2009.5245966