High precision control for piezo-actuated XY-table

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The piezo-actuated XY-table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the XY-table is a challenging task. This paper discusses the high precision adaptive control for the XY-table, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.

Original languageEnglish
Title of host publication2012 IEEE International Conference on Robotics and Biomimetics, ROBIO 2012 - Conference Digest
Pages2381-2386
Number of pages6
DOIs
Publication statusPublished - 2012
Event2012 IEEE International Conference on Robotics and Biomimetics, ROBIO 2012 - Guangzhou
Duration: 2012 Dec 112012 Dec 14

Other

Other2012 IEEE International Conference on Robotics and Biomimetics, ROBIO 2012
CityGuangzhou
Period12/12/1112/12/14

Fingerprint

Piezoelectric actuators
Hysteresis
Friction

ASJC Scopus subject areas

  • Artificial Intelligence
  • Biotechnology

Cite this

Chen, X. (2012). High precision control for piezo-actuated XY-table. In 2012 IEEE International Conference on Robotics and Biomimetics, ROBIO 2012 - Conference Digest (pp. 2381-2386). [6491326] https://doi.org/10.1109/ROBIO.2012.6491326

High precision control for piezo-actuated XY-table. / Chen, Xinkai.

2012 IEEE International Conference on Robotics and Biomimetics, ROBIO 2012 - Conference Digest. 2012. p. 2381-2386 6491326.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Chen, X 2012, High precision control for piezo-actuated XY-table. in 2012 IEEE International Conference on Robotics and Biomimetics, ROBIO 2012 - Conference Digest., 6491326, pp. 2381-2386, 2012 IEEE International Conference on Robotics and Biomimetics, ROBIO 2012, Guangzhou, 12/12/11. https://doi.org/10.1109/ROBIO.2012.6491326
Chen X. High precision control for piezo-actuated XY-table. In 2012 IEEE International Conference on Robotics and Biomimetics, ROBIO 2012 - Conference Digest. 2012. p. 2381-2386. 6491326 https://doi.org/10.1109/ROBIO.2012.6491326
Chen, Xinkai. / High precision control for piezo-actuated XY-table. 2012 IEEE International Conference on Robotics and Biomimetics, ROBIO 2012 - Conference Digest. 2012. pp. 2381-2386
@inproceedings{26254d13783a47268707eb189af962fa,
title = "High precision control for piezo-actuated XY-table",
abstract = "The piezo-actuated XY-table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the XY-table is a challenging task. This paper discusses the high precision adaptive control for the XY-table, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.",
author = "Xinkai Chen",
year = "2012",
doi = "10.1109/ROBIO.2012.6491326",
language = "English",
isbn = "9781467321273",
pages = "2381--2386",
booktitle = "2012 IEEE International Conference on Robotics and Biomimetics, ROBIO 2012 - Conference Digest",

}

TY - GEN

T1 - High precision control for piezo-actuated XY-table

AU - Chen, Xinkai

PY - 2012

Y1 - 2012

N2 - The piezo-actuated XY-table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the XY-table is a challenging task. This paper discusses the high precision adaptive control for the XY-table, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.

AB - The piezo-actuated XY-table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the XY-table is a challenging task. This paper discusses the high precision adaptive control for the XY-table, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.

UR - http://www.scopus.com/inward/record.url?scp=84876466776&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84876466776&partnerID=8YFLogxK

U2 - 10.1109/ROBIO.2012.6491326

DO - 10.1109/ROBIO.2012.6491326

M3 - Conference contribution

SN - 9781467321273

SP - 2381

EP - 2386

BT - 2012 IEEE International Conference on Robotics and Biomimetics, ROBIO 2012 - Conference Digest

ER -