High precision control for piezo-actuated XY-table

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The piezo-actuated XY-table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the XY-table is a challenging task. This paper discusses the high precision adaptive control for the XY-table, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.

Original languageEnglish
Title of host publication2012 IEEE International Conference on Robotics and Biomimetics, ROBIO 2012 - Conference Digest
Pages2381-2386
Number of pages6
DOIs
Publication statusPublished - 2012 Dec 1
Event2012 IEEE International Conference on Robotics and Biomimetics, ROBIO 2012 - Guangzhou, China
Duration: 2012 Dec 112012 Dec 14

Publication series

Name2012 IEEE International Conference on Robotics and Biomimetics, ROBIO 2012 - Conference Digest

Conference

Conference2012 IEEE International Conference on Robotics and Biomimetics, ROBIO 2012
CountryChina
CityGuangzhou
Period12/12/1112/12/14

ASJC Scopus subject areas

  • Artificial Intelligence
  • Biotechnology

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  • Cite this

    Chen, X. (2012). High precision control for piezo-actuated XY-table. In 2012 IEEE International Conference on Robotics and Biomimetics, ROBIO 2012 - Conference Digest (pp. 2381-2386). [6491326] (2012 IEEE International Conference on Robotics and Biomimetics, ROBIO 2012 - Conference Digest). https://doi.org/10.1109/ROBIO.2012.6491326