High precision control of the piezo-actuated stage

Toshikuni Ozaki, Xinkai Chen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The piezo-actuated nano-positioner is composed of a piezoelectric actuator (PEA) and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the PEA and the friction behavior in the PM, the accurate position control of the piezo-actuated stage is a challenging task. This paper discusses the adaptive control for the piezo-actuated nano-positioner, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the zero output tracking of the controlled nano-positioner. Experimental results show the effectiveness of the proposed method.

Original languageEnglish
Title of host publication2010 International Conference on Modelling, Identification and Control, ICMIC 2010
Pages376-381
Number of pages6
Publication statusPublished - 2010 Oct 18
Event2010 International Conference on Modelling, Identification and Control, ICMIC 2010 - Okayama, Japan
Duration: 2010 Jul 172010 Jul 19

Publication series

Name2010 International Conference on Modelling, Identification and Control, ICMIC 2010

Conference

Conference2010 International Conference on Modelling, Identification and Control, ICMIC 2010
CountryJapan
CityOkayama
Period10/7/1710/7/19

ASJC Scopus subject areas

  • Control and Systems Engineering

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  • Cite this

    Ozaki, T., & Chen, X. (2010). High precision control of the piezo-actuated stage. In 2010 International Conference on Modelling, Identification and Control, ICMIC 2010 (pp. 376-381). [5553535] (2010 International Conference on Modelling, Identification and Control, ICMIC 2010).