High precision control of the piezo-actuated stage

Toshikuni Ozaki, Xinkai Chen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The piezo-actuated nano-positioner is composed of a piezoelectric actuator (PEA) and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the PEA and the friction behavior in the PM, the accurate position control of the piezo-actuated stage is a challenging task. This paper discusses the adaptive control for the piezo-actuated nano-positioner, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the zero output tracking of the controlled nano-positioner. Experimental results show the effectiveness of the proposed method.

Original languageEnglish
Title of host publication2010 International Conference on Modelling, Identification and Control, ICMIC 2010
Pages376-381
Number of pages6
Publication statusPublished - 2010
Event2010 International Conference on Modelling, Identification and Control, ICMIC 2010 - Okayama
Duration: 2010 Jul 172010 Jul 19

Other

Other2010 International Conference on Modelling, Identification and Control, ICMIC 2010
CityOkayama
Period10/7/1710/7/19

Fingerprint

Piezoelectric actuators
Position control
Hysteresis
Friction

ASJC Scopus subject areas

  • Control and Systems Engineering

Cite this

Ozaki, T., & Chen, X. (2010). High precision control of the piezo-actuated stage. In 2010 International Conference on Modelling, Identification and Control, ICMIC 2010 (pp. 376-381). [5553535]

High precision control of the piezo-actuated stage. / Ozaki, Toshikuni; Chen, Xinkai.

2010 International Conference on Modelling, Identification and Control, ICMIC 2010. 2010. p. 376-381 5553535.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ozaki, T & Chen, X 2010, High precision control of the piezo-actuated stage. in 2010 International Conference on Modelling, Identification and Control, ICMIC 2010., 5553535, pp. 376-381, 2010 International Conference on Modelling, Identification and Control, ICMIC 2010, Okayama, 10/7/17.
Ozaki T, Chen X. High precision control of the piezo-actuated stage. In 2010 International Conference on Modelling, Identification and Control, ICMIC 2010. 2010. p. 376-381. 5553535
Ozaki, Toshikuni ; Chen, Xinkai. / High precision control of the piezo-actuated stage. 2010 International Conference on Modelling, Identification and Control, ICMIC 2010. 2010. pp. 376-381
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