High precision motion control of piezo-actuated stages using discrete-time sliding mode control with prescribed performance function

Nguyen Manh Linh; Xinkai Chen

doi:10.1109/ICARCV.2016.7838645

High precision motion control of piezo-actuated stages using discrete-time sliding mode control with prescribed performance function

Nguyen Manh Linh, Xinkai Chen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

In this paper, high precision motion control of piezo-actuated stage is discussed. In order to cope with the nonlinear characteristic of the piezoelectric actuator (PEA) and get high tracking performance, this paper proposes a new approach to design the discrete time sliding mode control (DSMC) with an ability to maintain the tracking error in a known region described by a performance function. The effectiveness of the proposed method is verified by experiments. The results show that the system not only performs well with complicated desired trajectories but also robust against external disturbances.

Original language	English
Title of host publication	2016 14th International Conference on Control, Automation, Robotics and Vision, ICARCV 2016
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781509035496
DOIs	https://doi.org/10.1109/ICARCV.2016.7838645
Publication status	Published - 2017 Jan 31
Event	14th International Conference on Control, Automation, Robotics and Vision, ICARCV 2016 - Phuket, Thailand Duration: 2016 Nov 13 → 2016 Nov 15

Publication series

Name	2016 14th International Conference on Control, Automation, Robotics and Vision, ICARCV 2016

Other

Other	14th International Conference on Control, Automation, Robotics and Vision, ICARCV 2016
Country/Territory	Thailand
City	Phuket
Period	16/11/13 → 16/11/15

Keywords

Piezo-actuated stage
disturbance observer
prescribed performance control
sliding mode control

ASJC Scopus subject areas

Artificial Intelligence
Control and Optimization
Instrumentation
Computer Vision and Pattern Recognition

Access to Document

10.1109/ICARCV.2016.7838645

Cite this

Linh, N. M., & Chen, X. (2017). High precision motion control of piezo-actuated stages using discrete-time sliding mode control with prescribed performance function. In 2016 14th International Conference on Control, Automation, Robotics and Vision, ICARCV 2016 [7838645] (2016 14th International Conference on Control, Automation, Robotics and Vision, ICARCV 2016). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ICARCV.2016.7838645

High precision motion control of piezo-actuated stages using discrete-time sliding mode control with prescribed performance function. / Linh, Nguyen Manh; Chen, Xinkai.

2016 14th International Conference on Control, Automation, Robotics and Vision, ICARCV 2016. Institute of Electrical and Electronics Engineers Inc., 2017. 7838645 (2016 14th International Conference on Control, Automation, Robotics and Vision, ICARCV 2016).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Linh, NM & Chen, X 2017, High precision motion control of piezo-actuated stages using discrete-time sliding mode control with prescribed performance function. in 2016 14th International Conference on Control, Automation, Robotics and Vision, ICARCV 2016., 7838645, 2016 14th International Conference on Control, Automation, Robotics and Vision, ICARCV 2016, Institute of Electrical and Electronics Engineers Inc., 14th International Conference on Control, Automation, Robotics and Vision, ICARCV 2016, Phuket, Thailand, 16/11/13. https://doi.org/10.1109/ICARCV.2016.7838645

Linh NM, Chen X. High precision motion control of piezo-actuated stages using discrete-time sliding mode control with prescribed performance function. In 2016 14th International Conference on Control, Automation, Robotics and Vision, ICARCV 2016. Institute of Electrical and Electronics Engineers Inc. 2017. 7838645. (2016 14th International Conference on Control, Automation, Robotics and Vision, ICARCV 2016). https://doi.org/10.1109/ICARCV.2016.7838645

Linh, Nguyen Manh ; Chen, Xinkai. / High precision motion control of piezo-actuated stages using discrete-time sliding mode control with prescribed performance function. 2016 14th International Conference on Control, Automation, Robotics and Vision, ICARCV 2016. Institute of Electrical and Electronics Engineers Inc., 2017. (2016 14th International Conference on Control, Automation, Robotics and Vision, ICARCV 2016).

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High precision motion control of piezo-actuated stages using discrete-time sliding mode control with prescribed performance function

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Keywords

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