High precision motion control of piezo-actuated stages using discrete-time sliding mode control with prescribed performance function

Nguyen Manh Linh, Xinkai Chen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper, high precision motion control of piezo-actuated stage is discussed. In order to cope with the nonlinear characteristic of the piezoelectric actuator (PEA) and get high tracking performance, this paper proposes a new approach to design the discrete time sliding mode control (DSMC) with an ability to maintain the tracking error in a known region described by a performance function. The effectiveness of the proposed method is verified by experiments. The results show that the system not only performs well with complicated desired trajectories but also robust against external disturbances.

LanguageEnglish
Title of host publication2016 14th International Conference on Control, Automation, Robotics and Vision, ICARCV 2016
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781509035496
DOIs
StatePublished - 2017 Jan 31
Event14th International Conference on Control, Automation, Robotics and Vision, ICARCV 2016 - Phuket, Thailand
Duration: 2016 Nov 132016 Nov 15

Other

Other14th International Conference on Control, Automation, Robotics and Vision, ICARCV 2016
CountryThailand
CityPhuket
Period16/11/1316/11/15

Fingerprint

Piezoelectric actuators
Sliding mode control
Motion control
sliding
Trajectories
piezoelectric actuators
disturbances
Experiments
trajectories

Keywords

  • disturbance observer
  • Piezo-actuated stage
  • prescribed performance control
  • sliding mode control

ASJC Scopus subject areas

  • Artificial Intelligence
  • Control and Optimization
  • Instrumentation
  • Computer Vision and Pattern Recognition

Cite this

Linh, N. M., & Chen, X. (2017). High precision motion control of piezo-actuated stages using discrete-time sliding mode control with prescribed performance function. In 2016 14th International Conference on Control, Automation, Robotics and Vision, ICARCV 2016 [7838645] Institute of Electrical and Electronics Engineers Inc.. DOI: 10.1109/ICARCV.2016.7838645

High precision motion control of piezo-actuated stages using discrete-time sliding mode control with prescribed performance function. / Linh, Nguyen Manh; Chen, Xinkai.

2016 14th International Conference on Control, Automation, Robotics and Vision, ICARCV 2016. Institute of Electrical and Electronics Engineers Inc., 2017. 7838645.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Linh, NM & Chen, X 2017, High precision motion control of piezo-actuated stages using discrete-time sliding mode control with prescribed performance function. in 2016 14th International Conference on Control, Automation, Robotics and Vision, ICARCV 2016., 7838645, Institute of Electrical and Electronics Engineers Inc., 14th International Conference on Control, Automation, Robotics and Vision, ICARCV 2016, Phuket, Thailand, 16/11/13. DOI: 10.1109/ICARCV.2016.7838645
Linh NM, Chen X. High precision motion control of piezo-actuated stages using discrete-time sliding mode control with prescribed performance function. In 2016 14th International Conference on Control, Automation, Robotics and Vision, ICARCV 2016. Institute of Electrical and Electronics Engineers Inc.2017. 7838645. Available from, DOI: 10.1109/ICARCV.2016.7838645
Linh, Nguyen Manh ; Chen, Xinkai. / High precision motion control of piezo-actuated stages using discrete-time sliding mode control with prescribed performance function. 2016 14th International Conference on Control, Automation, Robotics and Vision, ICARCV 2016. Institute of Electrical and Electronics Engineers Inc., 2017.
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