Higher-k LaYOx films with strong moisture resistance

Yi Zhao, Koji Kita, Kentaro Kyuno, Akira Toriumi

Research output: Contribution to journalArticle

63 Citations (Scopus)

Abstract

The permittivities and the moisture resistance of LaY Ox films annealed at 600 °C with different Y concentrations are investigated. The permittivities of 40%Y-LaY Ox and 70%Y-LaY Ox films are higher than 25. The high permittivities come from the well crystallized hexagonal phase of LaY Ox films, since the hexagonal phase rare earth oxides show higher permittivity than the cubic phase ones due to the smaller molar volume of the hexagonal phase. Furthermore, the high permittivity LaY Ox films (40%Y-LaY Ox and 70%Y-LaY Ox) show a strong resistance to the moisture due to the introduction of Y2 O3.

Original languageEnglish
Article number252905
JournalApplied Physics Letters
Volume89
Issue number25
DOIs
Publication statusPublished - 2006
Externally publishedYes

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moisture resistance
permittivity
moisture
rare earth elements
oxides

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Higher-k LaYOx films with strong moisture resistance. / Zhao, Yi; Kita, Koji; Kyuno, Kentaro; Toriumi, Akira.

In: Applied Physics Letters, Vol. 89, No. 25, 252905, 2006.

Research output: Contribution to journalArticle

Zhao, Yi ; Kita, Koji ; Kyuno, Kentaro ; Toriumi, Akira. / Higher-k LaYOx films with strong moisture resistance. In: Applied Physics Letters. 2006 ; Vol. 89, No. 25.
@article{0d3a0656d8314e00bb729db6d5a6fca2,
title = "Higher-k LaYOx films with strong moisture resistance",
abstract = "The permittivities and the moisture resistance of LaY Ox films annealed at 600 °C with different Y concentrations are investigated. The permittivities of 40{\%}Y-LaY Ox and 70{\%}Y-LaY Ox films are higher than 25. The high permittivities come from the well crystallized hexagonal phase of LaY Ox films, since the hexagonal phase rare earth oxides show higher permittivity than the cubic phase ones due to the smaller molar volume of the hexagonal phase. Furthermore, the high permittivity LaY Ox films (40{\%}Y-LaY Ox and 70{\%}Y-LaY Ox) show a strong resistance to the moisture due to the introduction of Y2 O3.",
author = "Yi Zhao and Koji Kita and Kentaro Kyuno and Akira Toriumi",
year = "2006",
doi = "10.1063/1.2420794",
language = "English",
volume = "89",
journal = "Applied Physics Letters",
issn = "0003-6951",
publisher = "American Institute of Physics Publising LLC",
number = "25",

}

TY - JOUR

T1 - Higher-k LaYOx films with strong moisture resistance

AU - Zhao, Yi

AU - Kita, Koji

AU - Kyuno, Kentaro

AU - Toriumi, Akira

PY - 2006

Y1 - 2006

N2 - The permittivities and the moisture resistance of LaY Ox films annealed at 600 °C with different Y concentrations are investigated. The permittivities of 40%Y-LaY Ox and 70%Y-LaY Ox films are higher than 25. The high permittivities come from the well crystallized hexagonal phase of LaY Ox films, since the hexagonal phase rare earth oxides show higher permittivity than the cubic phase ones due to the smaller molar volume of the hexagonal phase. Furthermore, the high permittivity LaY Ox films (40%Y-LaY Ox and 70%Y-LaY Ox) show a strong resistance to the moisture due to the introduction of Y2 O3.

AB - The permittivities and the moisture resistance of LaY Ox films annealed at 600 °C with different Y concentrations are investigated. The permittivities of 40%Y-LaY Ox and 70%Y-LaY Ox films are higher than 25. The high permittivities come from the well crystallized hexagonal phase of LaY Ox films, since the hexagonal phase rare earth oxides show higher permittivity than the cubic phase ones due to the smaller molar volume of the hexagonal phase. Furthermore, the high permittivity LaY Ox films (40%Y-LaY Ox and 70%Y-LaY Ox) show a strong resistance to the moisture due to the introduction of Y2 O3.

UR - http://www.scopus.com/inward/record.url?scp=33845946419&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33845946419&partnerID=8YFLogxK

U2 - 10.1063/1.2420794

DO - 10.1063/1.2420794

M3 - Article

VL - 89

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 25

M1 - 252905

ER -