Higher-k LaYOx films with strong moisture resistance

Yi Zhao, Koji Kita, Kentaro Kyuno, Akira Toriumi

Research output: Contribution to journalArticle

66 Citations (Scopus)

Fingerprint Dive into the research topics of 'Higher-k LaYO<sub>x</sub> films with strong moisture resistance'. Together they form a unique fingerprint.

Physics & Astronomy