Higher-k LaYOx films with strong moisture resistance

Y.Zhao Y.Zhao, K.Kita K.Kita, K.Kyuno K.Kyuno, A.Toriumi A.Toriumi, Kentaro Kyuno

Research output: Contribution to journalArticle

63 Citations (Scopus)
Original languageEnglish
JournalApplied Physics Letters 89
Publication statusPublished - 2006 Dec 1

Cite this

Y.Zhao, Y. Z., K.Kita, K. K., K.Kyuno, K. K., A.Toriumi, A. T., & Kyuno, K. (2006). Higher-k LaYOx films with strong moisture resistance. Applied Physics Letters 89.