| Original language | English |
|---|---|
| Journal | Applied Physics Letters 89 |
| Publication status | Published - 2006 Dec 1 |
Higher-k LaYOx films with strong moisture resistance
Y.Zhao Y.Zhao, K.Kita K.Kita, K.Kyuno K.Kyuno, A.Toriumi A.Toriumi, Kentaro Kyuno
Research output: Contribution to journal › Article › peer-review
72
Citations
(Scopus)