Higher-k LaYOx films with strong moisture resistance

Y.Zhao Y.Zhao, K.Kita K.Kita, K.Kyuno K.Kyuno, A.Toriumi A.Toriumi, Kentaro Kyuno

Research output: Contribution to journalArticlepeer-review

66 Citations (Scopus)
Original languageEnglish
JournalApplied Physics Letters 89
Publication statusPublished - 2006 Dec 1

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