Higher-k LaYOx films with strong moisture resistance

Y.Zhao Y.Zhao, K.Kita K.Kita, K.Kyuno K.Kyuno, A.Toriumi A.Toriumi, Kentaro Kyuno

Research output: Contribution to journalArticle

63 Citations (Scopus)
Original languageEnglish
JournalApplied Physics Letters 89
Publication statusPublished - 2006 Dec 1

Cite this

Y.Zhao, Y. Z., K.Kita, K. K., K.Kyuno, K. K., A.Toriumi, A. T., & Kyuno, K. (2006). Higher-k LaYOx films with strong moisture resistance. Applied Physics Letters 89.

Higher-k LaYOx films with strong moisture resistance. / Y.Zhao, Y.Zhao; K.Kita, K.Kita; K.Kyuno, K.Kyuno; A.Toriumi, A.Toriumi; Kyuno, Kentaro.

In: Applied Physics Letters 89, 01.12.2006.

Research output: Contribution to journalArticle

Y.Zhao, YZ, K.Kita, KK, K.Kyuno, KK, A.Toriumi, AT & Kyuno, K 2006, 'Higher-k LaYOx films with strong moisture resistance', Applied Physics Letters 89.
Y.Zhao YZ, K.Kita KK, K.Kyuno KK, A.Toriumi AT, Kyuno K. Higher-k LaYOx films with strong moisture resistance. Applied Physics Letters 89. 2006 Dec 1.
Y.Zhao, Y.Zhao ; K.Kita, K.Kita ; K.Kyuno, K.Kyuno ; A.Toriumi, A.Toriumi ; Kyuno, Kentaro. / Higher-k LaYOx films with strong moisture resistance. In: Applied Physics Letters 89. 2006.
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