Imaging properties of bright-field and annular-dark-field scanning confocal electron microscopy

K. Mitsuishi, A. Hashimoto, M. Takeguchi, Masayuki Shimojo, K. Ishizuka

Research output: Contribution to journalArticle

19 Citations (Scopus)

Abstract

Imaging properties of scanning confocal electron microscopy (SCEM) were studied by calculating simple model systems using the multislice method. A simple geometrical explanation was given, particularly for the difference between bright field (BF) and annular dark field (ADF) SCEM. It is demonstrated that the BF-SCEM image contrast consists of two features. One gradually changes over a wide defocus range and depends on the lateral size of the object. Another appears only near the focus and is independent of sample size. On the contrary, ADF-SCEM image contrast does not depend on the lateral size of the object. Therefore, the ADF-SCEM will provide more readily interpretable image contrast.

Original languageEnglish
Pages (from-to)20-26
Number of pages7
JournalUltramicroscopy
Volume111
Issue number1
DOIs
Publication statusPublished - 2010 Dec
Externally publishedYes

Fingerprint

Confocal microscopy
Electron microscopy
Scanning
Imaging techniques
image contrast
scanning electron microscopy

Keywords

  • 3D STEM
  • Confocal electron microscopy
  • Confocal STEM
  • Image simulation
  • Multislice method
  • Optical sectioning
  • SCEM

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Instrumentation
  • Electronic, Optical and Magnetic Materials

Cite this

Imaging properties of bright-field and annular-dark-field scanning confocal electron microscopy. / Mitsuishi, K.; Hashimoto, A.; Takeguchi, M.; Shimojo, Masayuki; Ishizuka, K.

In: Ultramicroscopy, Vol. 111, No. 1, 12.2010, p. 20-26.

Research output: Contribution to journalArticle

Mitsuishi, K. ; Hashimoto, A. ; Takeguchi, M. ; Shimojo, Masayuki ; Ishizuka, K. / Imaging properties of bright-field and annular-dark-field scanning confocal electron microscopy. In: Ultramicroscopy. 2010 ; Vol. 111, No. 1. pp. 20-26.
@article{eb46660dd9c244dd8a5b2608085df859,
title = "Imaging properties of bright-field and annular-dark-field scanning confocal electron microscopy",
abstract = "Imaging properties of scanning confocal electron microscopy (SCEM) were studied by calculating simple model systems using the multislice method. A simple geometrical explanation was given, particularly for the difference between bright field (BF) and annular dark field (ADF) SCEM. It is demonstrated that the BF-SCEM image contrast consists of two features. One gradually changes over a wide defocus range and depends on the lateral size of the object. Another appears only near the focus and is independent of sample size. On the contrary, ADF-SCEM image contrast does not depend on the lateral size of the object. Therefore, the ADF-SCEM will provide more readily interpretable image contrast.",
keywords = "3D STEM, Confocal electron microscopy, Confocal STEM, Image simulation, Multislice method, Optical sectioning, SCEM",
author = "K. Mitsuishi and A. Hashimoto and M. Takeguchi and Masayuki Shimojo and K. Ishizuka",
year = "2010",
month = "12",
doi = "10.1016/j.ultramic.2010.08.004",
language = "English",
volume = "111",
pages = "20--26",
journal = "Ultramicroscopy",
issn = "0304-3991",
publisher = "Elsevier",
number = "1",

}

TY - JOUR

T1 - Imaging properties of bright-field and annular-dark-field scanning confocal electron microscopy

AU - Mitsuishi, K.

AU - Hashimoto, A.

AU - Takeguchi, M.

AU - Shimojo, Masayuki

AU - Ishizuka, K.

PY - 2010/12

Y1 - 2010/12

N2 - Imaging properties of scanning confocal electron microscopy (SCEM) were studied by calculating simple model systems using the multislice method. A simple geometrical explanation was given, particularly for the difference between bright field (BF) and annular dark field (ADF) SCEM. It is demonstrated that the BF-SCEM image contrast consists of two features. One gradually changes over a wide defocus range and depends on the lateral size of the object. Another appears only near the focus and is independent of sample size. On the contrary, ADF-SCEM image contrast does not depend on the lateral size of the object. Therefore, the ADF-SCEM will provide more readily interpretable image contrast.

AB - Imaging properties of scanning confocal electron microscopy (SCEM) were studied by calculating simple model systems using the multislice method. A simple geometrical explanation was given, particularly for the difference between bright field (BF) and annular dark field (ADF) SCEM. It is demonstrated that the BF-SCEM image contrast consists of two features. One gradually changes over a wide defocus range and depends on the lateral size of the object. Another appears only near the focus and is independent of sample size. On the contrary, ADF-SCEM image contrast does not depend on the lateral size of the object. Therefore, the ADF-SCEM will provide more readily interpretable image contrast.

KW - 3D STEM

KW - Confocal electron microscopy

KW - Confocal STEM

KW - Image simulation

KW - Multislice method

KW - Optical sectioning

KW - SCEM

UR - http://www.scopus.com/inward/record.url?scp=78149274917&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=78149274917&partnerID=8YFLogxK

U2 - 10.1016/j.ultramic.2010.08.004

DO - 10.1016/j.ultramic.2010.08.004

M3 - Article

C2 - 21111263

AN - SCOPUS:78149274917

VL - 111

SP - 20

EP - 26

JO - Ultramicroscopy

JF - Ultramicroscopy

SN - 0304-3991

IS - 1

ER -