Imaging properties of bright-field and annular-dark-field scanning confocal electron microscopy

K. Mitsuishi, A. Hashimoto, M. Takeguchi, M. Shimojo, K. Ishizuka

Research output: Contribution to journalArticle

19 Citations (Scopus)

Abstract

Imaging properties of scanning confocal electron microscopy (SCEM) were studied by calculating simple model systems using the multislice method. A simple geometrical explanation was given, particularly for the difference between bright field (BF) and annular dark field (ADF) SCEM. It is demonstrated that the BF-SCEM image contrast consists of two features. One gradually changes over a wide defocus range and depends on the lateral size of the object. Another appears only near the focus and is independent of sample size. On the contrary, ADF-SCEM image contrast does not depend on the lateral size of the object. Therefore, the ADF-SCEM will provide more readily interpretable image contrast.

Original languageEnglish
Pages (from-to)20-26
Number of pages7
JournalUltramicroscopy
Volume111
Issue number1
DOIs
Publication statusPublished - 2010 Dec 1

Keywords

  • 3D STEM
  • Confocal STEM
  • Confocal electron microscopy
  • Image simulation
  • Multislice method
  • Optical sectioning
  • SCEM

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Instrumentation

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