Improved characteristics of blue and green InGaN-based light-emitting diodes on Si grown by metalorganic chemical vapor deposition

Takashi Egawa, Tetsuji Moku, Hiroyasu Ishikawa, Kouji Ohtsuka, Takashi Jimbo

Research output: Contribution to journalArticle

103 Citations (Scopus)

Abstract

We report significantly improved characteristics of InGaN multiple-quantum well blue and green light-emitting diodes (LEDs) on Si (111) substrates using metalorganic chemical vapor deposition. A high-temperature-grown thin AlN layer and AlN/GaN multilayers have been used for the growth of high-quality active layer on Si substrate. The blue LED on Si exhibited an operating voltage of 4.1 V, a series resistance of 30 Ω, an optical output power of 18 μW and a peak emission wavelength of 478 nm with a full width at half maximum of 22 nm at 20 mA drive current. These characteristics are comparable to those of LED on sapphire substrate. The green LED was also fabricated on Si substrate successfully.

Original languageEnglish
JournalJapanese Journal of Applied Physics, Part 2: Letters
Volume41
Issue number6 B
Publication statusPublished - 2002 Jun 15
Externally publishedYes

Fingerprint

Metallorganic chemical vapor deposition
metalorganic chemical vapor deposition
Light emitting diodes
light emitting diodes
Substrates
Full width at half maximum
Sapphire
Semiconductor quantum wells
Multilayers
sapphire
quantum wells
Wavelength
output
Electric potential
electric potential
wavelengths
Temperature

Keywords

  • AlN layer
  • AlN/GaN multilayers
  • InGaN
  • LED on Si
  • MOCVD

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Improved characteristics of blue and green InGaN-based light-emitting diodes on Si grown by metalorganic chemical vapor deposition. / Egawa, Takashi; Moku, Tetsuji; Ishikawa, Hiroyasu; Ohtsuka, Kouji; Jimbo, Takashi.

In: Japanese Journal of Applied Physics, Part 2: Letters, Vol. 41, No. 6 B, 15.06.2002.

Research output: Contribution to journalArticle

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AU - Moku, Tetsuji

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AU - Ohtsuka, Kouji

AU - Jimbo, Takashi

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