Improvement of depth resolution of ADF-SCEM by deconvolution -- Effects of electron energy loss and chromatic aberration on depth resolution

Research output: Contribution to journalArticle

2 Citations (Scopus)
Original languageEnglish
Pages (from-to)603-611
JournalMicrosc. Microanal.
Volume18
Publication statusPublished - 2012 Dec 1

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