Improvement of depth resolution of ADF-SCEM by deconvolution -- Effects of electron energy loss and chromatic aberration on depth resolution

Research output: Contribution to journalArticle

2 Citations (Scopus)
Original languageEnglish
Pages (from-to)603-611
JournalMicrosc. Microanal.
Volume18
Publication statusPublished - 2012 Dec 1

Cite this

@article{6b9d74b687af4ef7b4617001ed2521b9,
title = "Improvement of depth resolution of ADF-SCEM by deconvolution -- Effects of electron energy loss and chromatic aberration on depth resolution",
author = "X. Zhang and Shimojo, {X. Zhang;M.Takeguchi;A.Hashimoto;K.Mitsuishi;M.Tezuka}",
year = "2012",
month = "12",
day = "1",
language = "English",
volume = "18",
pages = "603--611",
journal = "Microsc. Microanal.",

}

TY - JOUR

T1 - Improvement of depth resolution of ADF-SCEM by deconvolution -- Effects of electron energy loss and chromatic aberration on depth resolution

AU - Zhang, X.

AU - Shimojo, X. Zhang;M.Takeguchi;A.Hashimoto;K.Mitsuishi;M.Tezuka

PY - 2012/12/1

Y1 - 2012/12/1

M3 - Article

VL - 18

SP - 603

EP - 611

JO - Microsc. Microanal.

JF - Microsc. Microanal.

ER -