Improvement of depth resolution of ADF-SCEM by deconvolution: Effects of electron energy loss and chromatic aberration on depth resolution

Xiaobin Zhang, Masaki Takeguchi, Ayako Hashimoto, Kazutaka Mitsuishi, Meguru Tezuka, Masayuki Shimojo

Research output: Contribution to journalArticle

2 Citations (Scopus)

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Engineering & Materials Science

Physics & Astronomy