Improvement of friction and wear performance of titanium nitride films by chlorine ion implantation.

A. Mitsuo, T. Aizawa

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)1361-1366
Journalmaterials transactions, jim
Volume40 [12] (1999)
Publication statusPublished - 1800

Cite this

Improvement of friction and wear performance of titanium nitride films by chlorine ion implantation. / Mitsuo, A.; Aizawa, T.

In: materials transactions, jim, Vol. 40 [12] (1999), 1800, p. 1361-1366.

Research output: Contribution to journalArticle

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AU - Mitsuo, A.

AU - Aizawa, T.

PY - 1800

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M3 - Article

VL - 40 [12] (1999)

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