Improvement of Tribological Behavior in Thin Hard Coatings by Chlorine Ion Implantation

T. Aizawa, A. Mitsuo

Research output: Chapter in Book/Report/Conference proceedingConference contribution

8 Citations (Scopus)

Abstract

The application of chlorine ion implantation to thin hard coatings for improvement of tribological behavior in the coatings was analyzed. The TiN coating was selected as a targeting ceramic coating for hollow cathode discharge (HCD) ion-plated coating procedure. It was observed that the chlorine ion implantation to TiN coating significantly reduced the wear rate and the friction coefficients. The self-lubrication mechanism of the layers in terms of implanted ion species was also discussed.

Original languageEnglish
Title of host publicationASM Proceedings: Heat Treating
EditorsK. Funatani, G.E. Totten
Pages366-372
Number of pages7
Volume1
Publication statusPublished - 2000
Externally publishedYes
EventHeat Treating: Proceedings of the 20th Conference - St. Louis, MO
Duration: 2000 Oct 92000 Oct 12

Other

OtherHeat Treating: Proceedings of the 20th Conference
CitySt. Louis, MO
Period00/10/900/10/12

Fingerprint

Hard coatings
Chlorine
Ion implantation
Coatings
Ions
Ceramic coatings
Lubrication
Cathodes
Wear of materials
Friction

ASJC Scopus subject areas

  • Materials Science(all)

Cite this

Aizawa, T., & Mitsuo, A. (2000). Improvement of Tribological Behavior in Thin Hard Coatings by Chlorine Ion Implantation. In K. Funatani, & G. E. Totten (Eds.), ASM Proceedings: Heat Treating (Vol. 1, pp. 366-372)

Improvement of Tribological Behavior in Thin Hard Coatings by Chlorine Ion Implantation. / Aizawa, T.; Mitsuo, A.

ASM Proceedings: Heat Treating. ed. / K. Funatani; G.E. Totten. Vol. 1 2000. p. 366-372.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Aizawa, T & Mitsuo, A 2000, Improvement of Tribological Behavior in Thin Hard Coatings by Chlorine Ion Implantation. in K Funatani & GE Totten (eds), ASM Proceedings: Heat Treating. vol. 1, pp. 366-372, Heat Treating: Proceedings of the 20th Conference, St. Louis, MO, 00/10/9.
Aizawa T, Mitsuo A. Improvement of Tribological Behavior in Thin Hard Coatings by Chlorine Ion Implantation. In Funatani K, Totten GE, editors, ASM Proceedings: Heat Treating. Vol. 1. 2000. p. 366-372
Aizawa, T. ; Mitsuo, A. / Improvement of Tribological Behavior in Thin Hard Coatings by Chlorine Ion Implantation. ASM Proceedings: Heat Treating. editor / K. Funatani ; G.E. Totten. Vol. 1 2000. pp. 366-372
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