Improvements of the lateral resolution of the MFM technique

Michael Rudolf Koblischka, U. Hartmann, T. Sulzbach

Research output: Contribution to journalConference article

32 Citations (Scopus)

Abstract

We report on the preparation of high-resolution magnetic force microscopy (MFM) tips using the electron beam deposition method for MFM measurements on soft magnetic samples. Electron beam lithography using a scanning electron microscope was used to define small particles of magnetic material at the very end of a commercial scanning microscope tip to achieve maximum lateral resolution with low magnetic moment. Several approaches were tried out and demonstrated on permalloy thin films. The achieved resolution (down to 20 nm) is clearly proven by the fact that more details of the magnetic structure can be observed. However, it turned out that no standard exists in order to reliably determine the resolution of the MFM measurements; the development of such a standard will be a very important new task.

Original languageEnglish
Pages (from-to)93-97
Number of pages5
JournalThin Solid Films
Volume428
Issue number1-2
DOIs
Publication statusPublished - 2003 Mar 20
Externally publishedYes
EventProceedings of Symposium J on Growth and Evolution - Strasbourg, France
Duration: 2002 Jun 182002 Jun 21

Fingerprint

Magnetic force microscopy
magnetic force microscopy
electron beams
Scanning
scanning
Electron beam lithography
Magnetic structure
Magnetic materials
Permalloys (trademark)
magnetic materials
Magnetic moments
Electron beams
Microscopes
Electron microscopes
lithography
electron microscopes
magnetic moments
microscopes
Thin films
preparation

Keywords

  • MFM imaging
  • Preparation of tips
  • Resolution
  • Soft magnetic samples

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Cite this

Improvements of the lateral resolution of the MFM technique. / Koblischka, Michael Rudolf; Hartmann, U.; Sulzbach, T.

In: Thin Solid Films, Vol. 428, No. 1-2, 20.03.2003, p. 93-97.

Research output: Contribution to journalConference article

Koblischka, Michael Rudolf ; Hartmann, U. ; Sulzbach, T. / Improvements of the lateral resolution of the MFM technique. In: Thin Solid Films. 2003 ; Vol. 428, No. 1-2. pp. 93-97.
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