Improvements of the lateral resolution of the MFM technique

M. R. Koblischka; U. Hartmann; T. Sulzbach

doi:10.1016/S0040-6090(02)01278-6

Improvements of the lateral resolution of the MFM technique

M. R. Koblischka, U. Hartmann, T. Sulzbach

Research output: Contribution to journal › Conference article › peer-review

34 Citations (Scopus)

Abstract

We report on the preparation of high-resolution magnetic force microscopy (MFM) tips using the electron beam deposition method for MFM measurements on soft magnetic samples. Electron beam lithography using a scanning electron microscope was used to define small particles of magnetic material at the very end of a commercial scanning microscope tip to achieve maximum lateral resolution with low magnetic moment. Several approaches were tried out and demonstrated on permalloy thin films. The achieved resolution (down to 20 nm) is clearly proven by the fact that more details of the magnetic structure can be observed. However, it turned out that no standard exists in order to reliably determine the resolution of the MFM measurements; the development of such a standard will be a very important new task.

Original language	English
Pages (from-to)	93-97
Number of pages	5
Journal	Thin Solid Films
Volume	428
Issue number	1-2
DOIs	https://doi.org/10.1016/S0040-6090(02)01278-6
Publication status	Published - 2003 Mar 20
Externally published	Yes
Event	Proceedings of Symposium J on Growth and Evolution - Strasbourg, France Duration: 2002 Jun 18 → 2002 Jun 21

Keywords

MFM imaging
Preparation of tips
Resolution
Soft magnetic samples

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

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10.1016/S0040-6090(02)01278-6

Cite this

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title = "Improvements of the lateral resolution of the MFM technique",

abstract = "We report on the preparation of high-resolution magnetic force microscopy (MFM) tips using the electron beam deposition method for MFM measurements on soft magnetic samples. Electron beam lithography using a scanning electron microscope was used to define small particles of magnetic material at the very end of a commercial scanning microscope tip to achieve maximum lateral resolution with low magnetic moment. Several approaches were tried out and demonstrated on permalloy thin films. The achieved resolution (down to 20 nm) is clearly proven by the fact that more details of the magnetic structure can be observed. However, it turned out that no standard exists in order to reliably determine the resolution of the MFM measurements; the development of such a standard will be a very important new task.",

keywords = "MFM imaging, Preparation of tips, Resolution, Soft magnetic samples",

author = "Koblischka, {M. R.} and U. Hartmann and T. Sulzbach",

note = "Funding Information: The authors would like to thank all members of the MAGNETUDE consortium for helpful discussions, and A. M{\"u}ller, U. Memmert for assistance during the measurements. The permalloy samples were supplied by E. Sondergard, M. Bailleul, and C. Fermon (CEA Saclay, France). This work is part of the EU research project {\textquoteleft}MAGNETUDE{\textquoteright} under contract no. G5RD-CT-1999-00005. This financial support is gratefully acknowledged.; Proceedings of Symposium J on Growth and Evolution ; Conference date: 18-06-2002 Through 21-06-2002",

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doi = "10.1016/S0040-6090(02)01278-6",

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T1 - Improvements of the lateral resolution of the MFM technique

AU - Koblischka, M. R.

AU - Hartmann, U.

AU - Sulzbach, T.

N1 - Funding Information: The authors would like to thank all members of the MAGNETUDE consortium for helpful discussions, and A. Müller, U. Memmert for assistance during the measurements. The permalloy samples were supplied by E. Sondergard, M. Bailleul, and C. Fermon (CEA Saclay, France). This work is part of the EU research project ‘MAGNETUDE’ under contract no. G5RD-CT-1999-00005. This financial support is gratefully acknowledged.

PY - 2003/3/20

Y1 - 2003/3/20

N2 - We report on the preparation of high-resolution magnetic force microscopy (MFM) tips using the electron beam deposition method for MFM measurements on soft magnetic samples. Electron beam lithography using a scanning electron microscope was used to define small particles of magnetic material at the very end of a commercial scanning microscope tip to achieve maximum lateral resolution with low magnetic moment. Several approaches were tried out and demonstrated on permalloy thin films. The achieved resolution (down to 20 nm) is clearly proven by the fact that more details of the magnetic structure can be observed. However, it turned out that no standard exists in order to reliably determine the resolution of the MFM measurements; the development of such a standard will be a very important new task.

AB - We report on the preparation of high-resolution magnetic force microscopy (MFM) tips using the electron beam deposition method for MFM measurements on soft magnetic samples. Electron beam lithography using a scanning electron microscope was used to define small particles of magnetic material at the very end of a commercial scanning microscope tip to achieve maximum lateral resolution with low magnetic moment. Several approaches were tried out and demonstrated on permalloy thin films. The achieved resolution (down to 20 nm) is clearly proven by the fact that more details of the magnetic structure can be observed. However, it turned out that no standard exists in order to reliably determine the resolution of the MFM measurements; the development of such a standard will be a very important new task.

KW - MFM imaging

KW - Preparation of tips

KW - Resolution

KW - Soft magnetic samples

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UR - http://www.scopus.com/inward/citedby.url?scp=0037457113&partnerID=8YFLogxK

U2 - 10.1016/S0040-6090(02)01278-6

DO - 10.1016/S0040-6090(02)01278-6

M3 - Conference article

AN - SCOPUS:0037457113

SN - 0040-6090

VL - 428

SP - 93

EP - 97

JO - Thin Solid Films

JF - Thin Solid Films

IS - 1-2

T2 - Proceedings of Symposium J on Growth and Evolution

Y2 - 18 June 2002 through 21 June 2002

ER -

Improvements of the lateral resolution of the MFM technique

Abstract

Keywords

ASJC Scopus subject areas

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