Improving the lateral resolution of the MFM technique to the 10 nm range

M. R. Koblischka, U. Hartmann, T. Sulzbach

Research output: Contribution to journalArticlepeer-review

38 Citations (Scopus)


A powerful tool to investigate the magnetic properties of harddisk heads in the range of about 10 nm is demanded by magnetic data storage industry. Magnetic force microscopy (MFM) tips are prepared using the electron-beam deposition technique, which reaches the highest spatial resolution, but is not well suited for batch production. Therefore, also FIB milling is employed to produce MFM tips with a high aspect ratio similar to electron-beam deposition tips. We show that both types of tips not only improve the spatial resolution, but also considerably reduce perturbation effects on soft magnetic structures.

Original languageEnglish
Pages (from-to)2138-2140
Number of pages3
JournalJournal of Magnetism and Magnetic Materials
Issue numberIII
Publication statusPublished - 2004 May
Externally publishedYes


  • MFM imaging
  • Preparation of tips
  • Resolution
  • Soft magnetic sample

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics


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