Improving the lateral resolution of the MFM technique to the 10 nm range

M. R. Koblischka; U. Hartmann; T. Sulzbach

doi:10.1016/j.jmmm.2004.01.030

Improving the lateral resolution of the MFM technique to the 10 nm range

M. R. Koblischka, U. Hartmann, T. Sulzbach

Research output: Contribution to journal › Article › peer-review

38 Citations (Scopus)

Abstract

A powerful tool to investigate the magnetic properties of harddisk heads in the range of about 10 nm is demanded by magnetic data storage industry. Magnetic force microscopy (MFM) tips are prepared using the electron-beam deposition technique, which reaches the highest spatial resolution, but is not well suited for batch production. Therefore, also FIB milling is employed to produce MFM tips with a high aspect ratio similar to electron-beam deposition tips. We show that both types of tips not only improve the spatial resolution, but also considerably reduce perturbation effects on soft magnetic structures.

Original language	English
Pages (from-to)	2138-2140
Number of pages	3
Journal	Journal of Magnetism and Magnetic Materials
Volume	272-276
Issue number	III
DOIs	https://doi.org/10.1016/j.jmmm.2004.01.030
Publication status	Published - 2004 May
Externally published	Yes

Keywords

MFM imaging
Preparation of tips
Resolution
Soft magnetic sample

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics

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10.1016/j.jmmm.2004.01.030

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abstract = "A powerful tool to investigate the magnetic properties of harddisk heads in the range of about 10 nm is demanded by magnetic data storage industry. Magnetic force microscopy (MFM) tips are prepared using the electron-beam deposition technique, which reaches the highest spatial resolution, but is not well suited for batch production. Therefore, also FIB milling is employed to produce MFM tips with a high aspect ratio similar to electron-beam deposition tips. We show that both types of tips not only improve the spatial resolution, but also considerably reduce perturbation effects on soft magnetic structures.",

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AB - A powerful tool to investigate the magnetic properties of harddisk heads in the range of about 10 nm is demanded by magnetic data storage industry. Magnetic force microscopy (MFM) tips are prepared using the electron-beam deposition technique, which reaches the highest spatial resolution, but is not well suited for batch production. Therefore, also FIB milling is employed to produce MFM tips with a high aspect ratio similar to electron-beam deposition tips. We show that both types of tips not only improve the spatial resolution, but also considerably reduce perturbation effects on soft magnetic structures.

KW - MFM imaging

KW - Preparation of tips

KW - Resolution

KW - Soft magnetic sample

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JF - Journal of Magnetism and Magnetic Materials

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ER -

Improving the lateral resolution of the MFM technique to the 10 nm range

Abstract

Keywords

ASJC Scopus subject areas

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