In-situ nanofabrication of position and size controlled structures with electron microscopes

K. Furuya, K. Mitsuishi, M. Shimojo, M. Song, M. Tanaka, M. Takeguchi

Research output: Contribution to journalArticle

Original languageEnglish
JournalDefault journal
Publication statusPublished - 2005 Oct 1

Cite this

In-situ nanofabrication of position and size controlled structures with electron microscopes. / Furuya, K.; Mitsuishi, K.; Shimojo, M.; Song, M.; Tanaka, M.; Takeguchi, M.

In: Default journal, 01.10.2005.

Research output: Contribution to journalArticle

Furuya, K. ; Mitsuishi, K. ; Shimojo, M. ; Song, M. ; Tanaka, M. ; Takeguchi, M. / In-situ nanofabrication of position and size controlled structures with electron microscopes. In: Default journal. 2005.
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AU - Tanaka, M.

AU - Takeguchi, M.

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