Abstract
Mg-Ni films were grown on a silicon substrate using two magnetron sputter deposition sources and simultaneous Ar ion irradiation. X-ray diffraction microstructure and phase composition, EDX elemental composition and atomic force microscopy surface topography analysis showed that under low-energy Ar ion irradiation (bias voltages from 0 to -120 V), the Mg2Ni phase was dominant and on the contrary with the increase of ion energy (bias voltages from -120 to -200 V), the MgNi2 phase appeared. The Mg content changed from 63 at% down to 42 at% in films grown under bias voltages of 0 and -200 V, respectively. During hydrogenation at 8 bar, 270 °C for 3 h, films with a dominant phase of Mg2Ni were transformed into Mg2NiH4. Hydrogen in MgNi2 films was mainly in interstitials and tended to form bubbles.
Original language | English |
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Pages (from-to) | 1224-1228 |
Number of pages | 5 |
Journal | Vacuum |
Volume | 81 |
Issue number | 10 |
DOIs | |
Publication status | Published - 2007 Jun 15 |
Externally published | Yes |
Keywords
- Hydrogen storage
- Magnetron deposition
- Mg-Ni alloy
- Thin film
ASJC Scopus subject areas
- Instrumentation
- Condensed Matter Physics
- Surfaces, Coatings and Films