Influence of oxygen transfer in Hf-based high-k dielectrics on flatband voltage shift

Toshihide Nabatame, Masayuki Kimura, Hiroyuki Yamada, Akihiko Ohi, Tomoji Ohishi, Toyohiro Chikyow

Research output: Contribution to journalArticle

9 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science

Physics & Astronomy