Infrared absorption study of HfO2 and HfO2/Si interface ranging from 200cm-1 to 2000cm-1

Kazuyuki Tomida, Haruka Shimizu, Koji Kita, Kentaro Kyuno, Akira Toriumi

Research output: Contribution to journalConference articlepeer-review

9 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Infrared absorption study of HfO2 and HfO2/Si interface ranging from 200cm-1 to 2000cm-1'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds

Physics & Astronomy