Instability of Si-F bonds in fluorinated silicon oxide (SiOF) films formed by various techniques

Research output: Contribution to journalArticlepeer-review

51 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Instability of Si-F bonds in fluorinated silicon oxide (SiOF) films formed by various techniques'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds