Abstract
We have succeeded in growing plate shaped In0.3Ga 0.7As single crystals for substrate use by the traveling liquidus zone (TLZ) method. The TLZ method which we have invented for growing homogeneous mixed crystals requires diffusion-limited mass transport and convection in a melt should be avoided. In that point, large diameter crystals for substrates were difficult to be grown due to convection. Therefore, we attempted to grow plate shaped In0.3Ca0.7As crystals. Merits of plate crystals are suppression of convection in a melt during crystal growth by limiting the thickness of the plate and sufficient area for substrate use.
| Original language | English |
|---|---|
| Pages | 367-373 |
| Number of pages | 7 |
| Publication status | Published - 2005 Dec 1 |
| Event | 207th ECS Meeting - Quebec, Canada Duration: 2005 May 16 → 2005 May 20 |
Conference
| Conference | 207th ECS Meeting |
|---|---|
| Country | Canada |
| City | Quebec |
| Period | 05/5/16 → 05/5/20 |
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ASJC Scopus subject areas
- Engineering(all)
Cite this
Kinoshita, K., Ogata, Y., Adachi, S., Natsuisaka, M., Ishikawa, T., Masaki, T., & Yoda, S. (2005). In0.3Ga0.7As plate crystal growth for substrates by the TLZ method. 367-373. Paper presented at 207th ECS Meeting, Quebec, Canada.