Integrated Interconnect Module Development

J.T.Pan J.T.Pan, D.Ma D.Ma, T.Sahin T.Sahin, R.Tolles R.Tolles, S.Broydo S.Broydo, H.Miyamoto H.Miyamoto, K.Kishimoto K.Kishimoto, M.Suzuki M.Suzuki, T.Homma T.Homma, M.Kikuchi M.Kikuchi, Tetsuya Homma

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)46-51
JournalProceedings of 13th VLSI Multilevel Interconnection Conference
Publication statusPublished - 1996 Jun 18

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J.T.Pan, J. T. P., D.Ma, D. M., T.Sahin, T. S., R.Tolles, R. T., S.Broydo, S. B., H.Miyamoto, H. M., K.Kishimoto, K. K., M.Suzuki, M. S., T.Homma, T. H., M.Kikuchi, M. K., & Homma, T. (1996). Integrated Interconnect Module Development. Proceedings of 13th VLSI Multilevel Interconnection Conference, 46-51.