Integration of terraced laser diode and garnet crystals by wafer direct bonding

Hideki Yokoi, Takashi Waniishi, Tetsuya Mizumoto, Masafumi Shimizu, Kazumasa Sakurai, Naoki Futakuchi, Yoshiaki Nakano

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

Integration of a semiconductor laser diode and an optical isolator was studied using the wafer direct bonding technique. A terraced laser diode was fabricated by reactive ion etching using CH4/H2/O2 gas. A smooth and vertical mirror facet was obtained by adjusting the flow rate of the etchant gas. Room-temperature pulsed laser operation was achieved in the laser diode with one cleaved facet and the second facet formed by reactive ion etching. The terraced laser diode was integrated with garnet crystals by wafer direct bonding. Room-temperature pulsed laser operation was confirmed after the bonding process.

Original languageEnglish
Pages (from-to)3463-3467
Number of pages5
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume40
Issue number5 A
DOIs
Publication statusPublished - 2001 May
Externally publishedYes

Keywords

  • Garnet crystals
  • InP
  • Laser diode
  • Optical isolator
  • Reactive ion etching
  • Wafer direct bonding

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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