Interface Reaction of High-k Films with Germanium Substrate

A. Toriumi, K. Kita, M. Toyama, K. Kyuno

Research output: Contribution to journalArticle

Original languageEnglish
Journal2005 MRS Spring Meeting
Publication statusPublished - 2005 Mar 1

Cite this

Interface Reaction of High-k Films with Germanium Substrate. / Toriumi, A.; Kita, K.; Toyama, M.; Kyuno, K.

In: 2005 MRS Spring Meeting, 01.03.2005.

Research output: Contribution to journalArticle

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title = "Interface Reaction of High-k Films with Germanium Substrate",
author = "A. Toriumi and K. Kita and M. Toyama and K. Kyuno",
year = "2005",
month = "3",
day = "1",
language = "English",
journal = "2005 MRS Spring Meeting",

}

TY - JOUR

T1 - Interface Reaction of High-k Films with Germanium Substrate

AU - Toriumi, A.

AU - Kita, K.

AU - Toyama, M.

AU - Kyuno, K.

PY - 2005/3/1

Y1 - 2005/3/1

M3 - Article

JO - 2005 MRS Spring Meeting

JF - 2005 MRS Spring Meeting

ER -