| Original language | English |
|---|---|
| Pages (from-to) | 245-252 |
| Journal | Semicon Japan, Semiconductor Equipment and Materials International, Technical Proceedings |
| Publication status | Published - 1990 Oct 22 |
Cite this
Numasawa, Y., Akimoto, Y. NY. IT. HK., & Homma, T. (1990). Interlayer Film Planarization. Semicon Japan, Semiconductor Equipment and Materials International, Technical Proceedings, 245-252.
Interlayer Film Planarization. / Numasawa, Y.; Akimoto, Y. Numasawa;Y.Ikeda;T.Homma;K.; Homma, Tetsuya.
In: Semicon Japan, Semiconductor Equipment and Materials International, Technical Proceedings, 22.10.1990, p. 245-252.Research output: Contribution to journal › Article
Numasawa, Y, Akimoto, YNYITHK & Homma, T 1990, 'Interlayer Film Planarization', Semicon Japan, Semiconductor Equipment and Materials International, Technical Proceedings, pp. 245-252.
Numasawa Y, Akimoto YNYITHK, Homma T. Interlayer Film Planarization. Semicon Japan, Semiconductor Equipment and Materials International, Technical Proceedings. 1990 Oct 22;245-252.
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title = "Interlayer Film Planarization",
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AU - Akimoto, Y. Numasawa;Y.Ikeda;T.Homma;K.
AU - Homma, Tetsuya
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JO - Semicon Japan, Semiconductor Equipment and Materials International, Technical Proceedings
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