Original language | English |
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Pages (from-to) | 245-252 |
Journal | Semicon Japan, Semiconductor Equipment and Materials International, Technical Proceedings |
Publication status | Published - 1990 Oct 22 |
Interlayer Film Planarization
Y. Numasawa, Y. Numasawa;Y.Ikeda;T.Homma;K. Akimoto, Tetsuya Homma
Research output: Contribution to journal › Article › peer-review