Interlayer Film Planarization

Y. Numasawa, Y. Numasawa;Y.Ikeda;T.Homma;K. Akimoto, Tetsuya Homma

Research output: Contribution to journal › Article

Original language	English
Pages (from-to)	245-252
Journal	Semicon Japan, Semiconductor Equipment and Materials International, Technical Proceedings
Publication status	Published - 1990 Oct 22

Cite this

@article{7895a70699f44ec2b7a1555ba782c0df,

title = "Interlayer Film Planarization",

author = "Y. Numasawa and Akimoto, {Y. Numasawa;Y.Ikeda;T.Homma;K.} and Tetsuya Homma",

year = "1990",

month = oct,

day = "22",

language = "English",

pages = "245--252",

journal = "Semicon Japan, Semiconductor Equipment and Materials International, Technical Proceedings",

}

TY - JOUR

T1 - Interlayer Film Planarization

AU - Numasawa, Y.

AU - Akimoto, Y. Numasawa;Y.Ikeda;T.Homma;K.

AU - Homma, Tetsuya

PY - 1990/10/22

Y1 - 1990/10/22

M3 - Article

SP - 245

EP - 252

JO - Semicon Japan, Semiconductor Equipment and Materials International, Technical Proceedings

JF - Semicon Japan, Semiconductor Equipment and Materials International, Technical Proceedings

ER -