Interlayer Film Planarization

Y. Numasawa, Y. Numasawa;Y.Ikeda;T.Homma;K. Akimoto, Tetsuya Homma

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)245-252
JournalSemicon Japan, Semiconductor Equipment and Materials International, Technical Proceedings
Publication statusPublished - 1990 Oct 22

Cite this

Interlayer Film Planarization. / Numasawa, Y.; Akimoto, Y. Numasawa;Y.Ikeda;T.Homma;K.; Homma, Tetsuya.

In: Semicon Japan, Semiconductor Equipment and Materials International, Technical Proceedings, 22.10.1990, p. 245-252.

Research output: Contribution to journalArticle

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title = "Interlayer Film Planarization",
author = "Y. Numasawa and Akimoto, {Y. Numasawa;Y.Ikeda;T.Homma;K.} and Tetsuya Homma",
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pages = "245--252",
journal = "Semicon Japan, Semiconductor Equipment and Materials International, Technical Proceedings",

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AU - Akimoto, Y. Numasawa;Y.Ikeda;T.Homma;K.

AU - Homma, Tetsuya

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JO - Semicon Japan, Semiconductor Equipment and Materials International, Technical Proceedings

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