Interlayer Film Planarization Technology

Y.Numasawa Y.Numasawa, Y.Ikeda Y.Ikeda, T.Homma T.Homma, K.Akimoto K.Akimoto, Tetsuya Homma

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)245-252
JournalSemicon JAPAN Proceedings
Publication statusPublished - 1990 Oct 23

Cite this

Y.Numasawa, Y. N., Y.Ikeda, Y. I., T.Homma, T. H., K.Akimoto, K. A., & Homma, T. (1990). Interlayer Film Planarization Technology. Semicon JAPAN Proceedings, 245-252.

Interlayer Film Planarization Technology. / Y.Numasawa, Y.Numasawa; Y.Ikeda, Y.Ikeda; T.Homma, T.Homma; K.Akimoto, K.Akimoto; Homma, Tetsuya.

In: Semicon JAPAN Proceedings, 23.10.1990, p. 245-252.

Research output: Contribution to journalArticle

Y.Numasawa, YN, Y.Ikeda, YI, T.Homma, TH, K.Akimoto, KA & Homma, T 1990, 'Interlayer Film Planarization Technology', Semicon JAPAN Proceedings, pp. 245-252.
Y.Numasawa YN, Y.Ikeda YI, T.Homma TH, K.Akimoto KA, Homma T. Interlayer Film Planarization Technology. Semicon JAPAN Proceedings. 1990 Oct 23;245-252.
Y.Numasawa, Y.Numasawa ; Y.Ikeda, Y.Ikeda ; T.Homma, T.Homma ; K.Akimoto, K.Akimoto ; Homma, Tetsuya. / Interlayer Film Planarization Technology. In: Semicon JAPAN Proceedings. 1990 ; pp. 245-252.
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