| Original language | English |
|---|---|
| Pages (from-to) | 245-252 |
| Journal | Semicon JAPAN Proceedings |
| Publication status | Published - 1990 Oct 23 |
Interlayer Film Planarization Technology
Y.Numasawa Y.Numasawa, Y.Ikeda Y.Ikeda, T.Homma T.Homma, K.Akimoto K.Akimoto, Tetsuya Homma
Research output: Contribution to journal › Article › peer-review