Interlayer Film Planarization Technology

Y.Numasawa Y.Numasawa, Y.Ikeda Y.Ikeda, T.Homma T.Homma, K.Akimoto K.Akimoto, Tetsuya Homma

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)245-252
JournalSemicon JAPAN Proceedings
Publication statusPublished - 1990 Oct 23

Cite this

Y.Numasawa, Y. N., Y.Ikeda, Y. I., T.Homma, T. H., K.Akimoto, K. A., & Homma, T. (1990). Interlayer Film Planarization Technology. Semicon JAPAN Proceedings, 245-252.