Inverse analysis with surface wave spectroscopy to determine material properties of thin film on substrate.

I. Ihara, T. Aizawa, J. Kihara, H. Koguchi

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)575-584
JournalSimulation of Materials Processing. Theory, Methods and Applications-
Volume(1995)
Publication statusPublished - 1995 Jul 1

Cite this

Inverse analysis with surface wave spectroscopy to determine material properties of thin film on substrate. / Ihara, I.; Aizawa, T.; Kihara, J.; Koguchi, H.

In: Simulation of Materials Processing. Theory, Methods and Applications-, Vol. (1995), 01.07.1995, p. 575-584.

Research output: Contribution to journalArticle

@article{e0a0bd287a454f87a0653009173d7305,
title = "Inverse analysis with surface wave spectroscopy to determine material properties of thin film on substrate.",
author = "I. Ihara and T. Aizawa and J. Kihara and H. Koguchi",
year = "1995",
month = "7",
day = "1",
language = "English",
volume = "(1995)",
pages = "575--584",
journal = "Simulation of Materials Processing. Theory, Methods and Applications-",

}

TY - JOUR

T1 - Inverse analysis with surface wave spectroscopy to determine material properties of thin film on substrate.

AU - Ihara, I.

AU - Aizawa, T.

AU - Kihara, J.

AU - Koguchi, H.

PY - 1995/7/1

Y1 - 1995/7/1

M3 - Article

VL - (1995)

SP - 575

EP - 584

JO - Simulation of Materials Processing. Theory, Methods and Applications-

JF - Simulation of Materials Processing. Theory, Methods and Applications-

ER -