Inverse analysis with surface wave spectroscopy to determine material properties of thin film on substrate.

I. Ihara, T. Aizawa, J. Kihara, H. Koguchi

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	575-584
Journal	Simulation of Materials Processing. Theory, Methods and Applications-
Volume	(1995)
Publication status	Published - 1995 Jul 1

Cite this

@article{e0a0bd287a454f87a0653009173d7305,

title = "Inverse analysis with surface wave spectroscopy to determine material properties of thin film on substrate.",

author = "I. Ihara and T. Aizawa and J. Kihara and H. Koguchi",

year = "1995",

month = jul,

day = "1",

language = "English",

volume = "(1995)",

pages = "575--584",

journal = "Simulation of Materials Processing. Theory, Methods and Applications-",

}

TY - JOUR

T1 - Inverse analysis with surface wave spectroscopy to determine material properties of thin film on substrate.

AU - Ihara, I.

AU - Aizawa, T.

AU - Kihara, J.

AU - Koguchi, H.

PY - 1995/7/1

Y1 - 1995/7/1

M3 - Article

VL - (1995)

SP - 575

EP - 584

JO - Simulation of Materials Processing. Theory, Methods and Applications-

JF - Simulation of Materials Processing. Theory, Methods and Applications-

ER -