Original language | English |
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Pages (from-to) | 575-584 |
Journal | Simulation of Materials Processing. Theory, Methods and Applications- |
Volume | (1995) |
Publication status | Published - 1995 Jul 1 |
Inverse analysis with surface wave spectroscopy to determine material properties of thin film on substrate.
I. Ihara, T. Aizawa, J. Kihara, H. Koguchi
Research output: Contribution to journal › Article › peer-review