Inverse analysis with surface wave spectroscopy to determine material properties of thin film on substrate.

I. Ihara, T. Aizawa, J. Kihara, H. Koguchi

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)575-584
JournalSimulation of Materials Processing. Theory, Methods and Applications-
Volume(1995)
Publication statusPublished - 1995 Jul 1

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